@article{TUW-297943,
author = {Aguinsky, Luiz Felipe and Wachter, Georg and Manstetten, Paul and Rodrigues, Francio and Trupke, Michael and Schmid, Ulrich and H{\"o}ssinger, Andreas and Weinbub, Josef},
title = {{M}odeling and {A}nalysis of {S}ulfur {H}exafluoride {P}lasma {E}tching for {S}ilicon {M}icrocavity {R}esonators},
journal = {{J}ournal of {M}icromechanics and {M}icroengineering},
year = {2021},
volume = {31},
number = {12},
pages = {125003-1--125003-9},
url = {https://www.iue.tuwien.ac.at/pdf/ib_2021/JB2021_Aguinsky_1.pdf},
doi = {10.1088/1361-6439/ac2bad}
}
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