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@incollection{TUW-299016,
    author = {Reiter, Tobias and Klemenschits, Xaver and Filipovic, Lado},
    title = {{I}mpact of {H}igh-{A}spect-{R}atio {E}tching {D}amage on {S}elective {E}pitaxial {S}ilicon {G}rowth in 3{D} {N}{A}{N}{D} {F}lash {M}emory},
    booktitle = {{P}roceedings of the 2021 {J}oint {I}nternational {E}{U}{R}{O}{S}{O}{I} {W}orkshop and {I}nternational {C}onference on {U}ltimate {I}ntegration on {S}ilicon ({E}{U}{R}{O}{S}{O}{I}-{U}{L}{I}{S})},
    year = {2021},
    editor = {Cretu, Bogdan},
    pages = {1--4},
    publisher = {{I}{E}{E}{E}},
    url = {https://www.iue.tuwien.ac.at/pdf/ib_2021/BC2021_Reiter_1.pdf},
    isbn = {978-1-6654-3745-5},
    doi = {10.1109/EuroSOI-ULIS53016.2021.9560693}
}



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