author = {Franco, J. and Marneffe, J.-F. and Vandooren, Anne and Arimura, H and Ragnarsson, L. A. and Claes, Dieter and Litta, Eugenio Dentoni and Horiguchi, N. and Croes, Kristof and Linten, D and Grasser, Tibor and Kaczer, Ben},
    title = {{Low Temperature Atomic Hydrogen Treatment for Superior NBTI Reliability -- Demonstration and Modeling across SiO{$_{2}$} IL Thicknesses from 1.8 to 0.6 nm for I/O and Core Logic}},
    booktitle = {2021 {S}ymposium on {V}{L}{S}{I} {T}echnology ({V}{L}{S}{I}{T})},
    year = {2021},
    pages = {1--2},
    url = {https://www.iue.tuwien.ac.at/pdf/ib_2021/CP2021_Grasser_3.pdf},
    isbn = {978-1-6654-1945-1},
    note = {talk: {I}nternational {S}ymposium on {V}{L}{S}{I} {T}echnology, {K}yoto, {J}apan; 2021-06-13 -- 2021-06-19}

Created from the Publication Database of the Vienna University of Technology.