@article{TUW-303616,
author = {Reiter, Tobias and Klemenschits, Xaver and Filipovic, Lado},
title = {{I}mpact of {P}lasma {I}nduced {D}amage on the {F}abrication of 3{D} {N}{A}{N}{D} {F}lash {M}emory},
journal = {{S}olid-{S}tate {E}lectronics},
year = {2022},
volume = {192},
pages = {108261-1--108261-9},
url = {https://www.iue.tuwien.ac.at/pdf/ib_2022/JB2021_Reiter_1.pdf},
doi = {10.1016/j.sse.2022.108261},
note = {invited}
}
Created from the Publication Database of the Vienna University of Technology.