author = {Bobinac, Josip and Reiter, Tobias and Piso, Julius and Klemenschits, Xaver and Baumgartner, O and Stanojevic, Zlatan and Strof, G and Karner, M and Filipovic, Lado},
    title = {{I}mpact of {M}ask {T}apering on {S}{F}6/{O}2 {P}lasma {E}tching},
    booktitle = {{M}icroelectronic {D}evices and {T}echnologies: {P}roceedings of the 4rd {I}nternational {C}onference on {M}icroelectronic {D}evices and {T}echnologies ({M}ic{D}{A}{T} '2022)},
    year = {2022},
    pages = {90--94},
    isbn = {978-84-09-43856-3},
    keywords = {{P}lasma {E}tching, high aspect ratio, 3{D} integration, {S}{F}6/{O}2, mask tapering},
    note = {talk: {F}ourth {I}nternational {C}onference on {M}icroelectronic {D}evices and {T}echnologies ({M}ic{D}{A}{T} '2022), {C}orfu, {G}reece; 2022-09-21 -- 2022-09-23}

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