@article{TUW-304608,
author = {Lenz, Christoph and Manstetten, Paul and Aguinsky, Luiz Felipe and Rodrigues, Francio and H{\"o}ssinger, Andreas and Weinbub, Josef},
title = {{A}utomatic {G}rid {R}efinement for {T}hin {M}aterial {L}ayer {E}tching in {P}rocess {T}{C}{A}{D} {S}imulations},
journal = {{S}olid-{S}tate {E}lectronics},
year = {2022},
volume = {200},
number = {10258},
doi = {10.1016/j.sse.2022.108534},
keywords = {{P}rocess technology computer-aided design, {T}opography simulation, {L}evel-set method, {H}ierarchical grids, {L}ight-emitting diodes},
note = {invited}
}
Created from the Publication Database of the Vienna University of Technology.