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Publikationsliste für
Silvan Schmid
als Autorin / Autor bzw. wesentlich beteiligte Person

78 Datensätze (2016 - 2022)


Bücher und Buch-Herausgaben


S. Schmid, L. Villanueva, M. Roukes:
"Fundamentals of Nanomechanical Resonators";
Springer International Publishing, Switzerland, 2016, ISBN: 978-3-319-28689-1; 175 S.


Zeitschriftenartikel


M. Bartmann, M. Sistani, N. Luhmann, S. Schmid, E. Bertagnolli, A. Lugstein, J. Smoliner:
"Germanium nanowire microbolometer";
Nanotechnology, 33 (2022), 245201; S. 1 - 6.

Zusätzliche Informationen

Z. Buch, S. Schmid:
"Design considerations of gold nanoantenna dimers for plasmomechanical transduction";
Optics Express, 30 (2022), 4; S. 5294 - 5303.

A. Casci Ceccacci, A. Cagliani, P. Marizza, S. Schmid, A. Boisen:
"Thin Film Analysis by Nanomechanical Infrared Spectroscopy";
ACS Omega, 4 (2019), 4; S. 7628 - 7635.

Zusätzliche Informationen

A. Casci Ceccacci, C.-H. Chen, E.-T. Hwu, L. Morelli, S. Bose, F. G. Bosco, S. Schmid, A. Boisen:
"Blu-Ray-based micromechanical characterization platform for biopolymer degradation assessment";
Sensors and Actuators B: Chemical, 241 (2017), S. 1303 - 1309.

Zusätzliche Informationen

N. Cazier, P. Sadeghi, M.-H. Chien, M. Shawrav, S. Schmid:
"Spectrally Broadband Electro-Optic Modulation with Nanoelectromechanical String Resonators";
Optics Express, 28 (2020), 8; S. 12294 - 12301.

Zusätzliche Informationen

M.-H. Chien, M. Brameshuber, B. Rossboth, G. Schütz, S. Schmid:
"Single-molecule optical absorption imaging by nanomechanical photothermal sensing";
PNAS - Proceedings of the National Academy of Sciences of the United States of America, 115 (2018), 44; S. 11150 - 11155.

M.-H. Chien, S. Schmid:
"Nanoelectromechanical photothermal polarization microscopy with 3 Å localization precision";
Journal of Applied Physics, 128 (2020), 134501; 61 S.

M.-H. Chien, M. Shawrav, K. Hingerl, P. Taus, M. Schinnerl, H. D. Wanzenböck, S. Schmid:
"Analysis of carbon content in direct-write plasmonic Au structures by nanomechanical scanning absorption microscopy";
Journal of Applied Physics, 129 (2021), 063105; S. 1 - 8.

M.-H. Chien, J. Steurer, P. Sadeghi, N. Cazier, S. Schmid:
"Nanoelectromechanical Position-Sensitive Detector with Picometer Resolution";
ACS Photonics, 7 (2020), 8; S. 2197 - 2203.

H. Kähler, D. Platz, S. Schmid:
"Surface acoustic wave coupling between micromechanical resonators";
Communications Physics, 5 (2022), 118; 8 S.

A. Kainz, R. Beigelbeck, S. Schmid:
"Modeling the Electrostatic Actuation of Nanomechanical Pillar Dimers";
Frontiers in Mechanical Engineering, 6 (2021), 611590; 9 S.

M. Kurek, M. Carnoy, P. Larsen, L.H. Nielsen, O. Hansen, T. Rades, S. Schmid, A. Boisen:
"Nanomechanical Infrared Spectroscopy with Vibrating Filters for Pharmaceutical Analysis";
Angewandte Chemie - International Edition, 56 (2017), 14; S. 3901 - 3905.

Zusätzliche Informationen

M. Kurek, F. Larsen, P. Larsen, S. Schmid, A. Boisen, S. Keller:
"Nanomechanical Pyrolytic Carbon Resonators : Novel Fabrication Method and Characterization of Mechanical Properties";
Sensors, 16 (2016), 1097; S. 1 - 11.

Zusätzliche Informationen

T. Larsen, S. Schmid, S. Dohn, J. E. Sader, A. Boisen, L. Villanueva:
"Position and mode dependent optical detection back-action in cantilever beam resonators";
Journal of Micromechanics and Microengineering, 27 (2017), S. 3500601 - 3500605.

Zusätzliche Informationen

N. Luhmann, D. Høj, M. Piller, H. Kähler, M.-H. Chien, R. West, U. Lund Andersen, S. Schmid:
"Ultrathin 2 nm gold as impedance-matched absorber for infrared light";
Nature Communications, 11 (2020), 2161; 7628 S.

N. Luhmann, A. Jachimowicz, J. Schalko, P. Sadeghi, M. Sauer, A. Foelske-Schmitz, S. Schmid:
"Effect of oxygen plasma on nanomechanical silicon nitride resonators";
Applied Physics Letters, 111 (2017), 6; S. 063103-1 - 063103-5.

Zusätzliche Informationen

M. Piller, N. Luhmann, M.-H. Chien, S. Schmid:
"Nanoelectromechanical infrared detector";
Proceedings of SPIE, Vol. 11088 (2019), S. 11088021 - 11088027.

Zusätzliche Informationen

M. Piller, P. Sadeghi, R. West, N. Luhmann, P. Martini, O. Hansen, S. Schmid:
"Thermal radiation dominated heat transfer in nanomechanical silicon nitride drum resonators";
Applied Physics Letters, 117 (2020), 3; 034101 S.

P. Sadeghi, A. Demir, L. Villanueva, H. Kähler, S. Schmid:
"Frequency fluctuations in nanomechanical silicon nitride string resonators";
Physical Review B, 102 (2020), 214106; 8 S.

P. Sadeghi, W. Kaiyu, A. Boisen, S. Schmid:
"Fabrication and characterization of Au dimer antennas on glass pillars with enhanced plasmonic response";
Nanophotonics, 30-6-2017 (2017).

P. Sadeghi, M. Tanzer, L. Christensen, S. Schmid:
"Influence of Clamp-Widening on the Quality Factor of Nanomechanical Silicon Nitride Resonators";
Journal of Applied Physics, Vol.126 (2019), Issue 16; S. 1651081 - 1651088.

Zusätzliche Informationen

P. Sadeghi, M. Tanzer, N. Luhmann, M. Piller, M.-H. Chien, S. Schmid:
"Thermal Transport and Frequency Response of Localized Modes on Low-Stress Nanomechanical Silicon Nitride Drums Featuring a Phononic-Band-Gap Structure";
Physical Review Applied, 14 (2020), 024068.


Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag)


A. J. Andersen, S. Yamada, P.E.K. Kumar, Th. L. Andresen, A. Boisen, S. Schmid:
"Nanomechanical IR spectroscopy for fast analysis of liquid-dispersed engineered nanomaterials";
Vortrag: EUROSENSORS 2016 - 30th Anniversary Eurosensors Conference, Budapest, Ungarn; 04.09.2016 - 07.09.2016; in: "Eurosensors XXX", (2016), 2 S.

A. Casci Ceccacci, L. Carnevali, P. Marizza, S. Schmid, A. Boisen:
"Assessment of hydrogel formation with nanomechanical IR spectroscopy";
Poster: 42nd International Conference on Nano Engineering, MNE 2016, Wien; 19.09.2016 - 23.09.2016; in: "Proceedings MNE 2016", (2016), S. 155.

N. Cazier, P. Sadeghi, M. Shawrav, Z. Buch, S. Schmid:
"Optical Detection of Gap Plasmonic Mode in Electromagnetically-Actuated Nanomechanical Silicon Nitride Strings";
Poster: 16th International Workshop in Nanomechanical Sensors (NMC 2019), Lausanne; 19.06.2019 - 21.06.2019; in: "16th International Workshop on Nanomechanical Sensors", (2019), S. 86.

N. Cazier, P. Sadeghi, M. Shawrav, A. Steiger-Thirsfeld, S. Schmid:
"Gap plasmon resonance in electromagnetically-actuated nanomechanical silicon nitride strings";
Poster: Microelectronic Systems Symposium (MESS18), Wien; 12.04.2018 - 13.04.2018; in: "MESS 18 Microelectronic Systems Symposium", OVE, Band 91 (2018), 978-3-903249-01-0; 1 S.

Zusätzliche Informationen

N. Cazier, P. Sadeghi, M. Shawrav, A. Steiger-Thirsfeld, S. Schmid:
"Gap Plasmon Resonance in Electromagnetically-Actuated Nanomechanical Silicon Nitride Strings";
Vortrag: 44th International Conference on Micro and Nanoengineering (MNE), Copenhagen; 24.09.2018 - 27.09.2018; in: "44th International Conference on Micro and Nanoengineering (MNE)", (2018), 1 S.

Zusätzliche Informationen

N. Cazier, P. Sadeghi, M. Shawrav, A. Steiger-Thirsfeld, S. Schmid:
"Gap plasmon resonance in electromagnetically-actuated nanomechanicalsilicon nitride strings";
Vortrag: Nanophotonics and Micro/Nano Optics International Conference 2017, Barcelona; 13.09.2017 - 15.09.2017; in: "Nanophotonics and Micro/Nano Optics International Conference 2017 Book of Abstracts", (2017), S. 62.

Zusätzliche Informationen

N. Cazier, P. Sadeghi, M. Shawrav, A. Steiger-Thirsfeld, S. Schmid:
"Nanoelectromechanically modulated plasmonic nanoslit";
Poster: Frontiers of Nanomechanical Systems ( FNS/2019 ), Palm Springs; 10.02.2019 - 14.02.2019; in: "Frontiers of Nanomechanical Systems (FNS/2019)", (2019), S. 65.

Zusätzliche Informationen

M.-H. Chien, M. Brameshuber, B. Rossboth, G. Schütz, S. Schmid:
"Single-molecule analysis with silicon nitride drums";
Vortrag: 44th International Conference on Micro and Nanoengineering (MNE), Copenhagen (eingeladen); 24.09.2018 - 27.09.2018; in: "44th International Conference on Micro and Nanoengineering (MNE)", (2018), 1 S.

Zusätzliche Informationen

M.-H. Chien, M. Brameshuber, B. Rossboth, G. Schütz, S. Schmid:
"Single-molecule optical absorption imaging by nanomechanical photothermal sensing at room temperature";
Poster: Eurosensors 2018, Graz; 09.09.2018 - 12.09.2018; in: "Proceedings Eurosensors 2018", MDPI, Volume 2 (2018), ISSN: 2504-3900.

Zusätzliche Informationen

M.-H. Chien, M. Brameshuber, B. Rossboth, G. Schütz, S. Schmid:
"Single-molecule Optical Absorption Imaging by Nanomechanical Photothermal Sensing at Room Temperature";
Vortrag: Conference on Lasers and Electro-Optics, San Jose, California United States; 05.05.2019 - 10.05.2019; in: "CLEO: Science and Innovations 2019", (2019), ISBN: 978-1-943580-57-6; S. 1 - 2.

Zusätzliche Informationen

M.-H. Chien, M. Brameshuber, B. Rossboth, G. Schütz, S. Schmid:
"Single-molecule optical absorption imaging by nanomechanical photothermal sensing at room temperature";
Vortrag: Frontiers of Nanomechanical Systems ( FNS/2019 ), Palm Springs (eingeladen); 10.02.2019 - 14.02.2019; in: "Frontiers of Nanomechanical Systems (FNS/2019)", (2019), S. 48.

M.-H. Chien, S. Schmid:
"Nanomechanical 2D membrane resonator as a platform for photothermal analysis and imaging of single nanoparticles";
Poster: 14th International Workshop on Nanomechanical Sensors NMC 2017, Kailua-Kona, Hawaii, USA; 04.04.2017 - 07.04.2017; in: "Poster Abstracts", (2017), S. 5.

M.-H. Chien, S. Schmid:
"Nanomechanical 2D-scanning photothermal microscopy for analysis and imaging of single sub- 10 nm nanoparticles";
Vortrag: Nanophotonics and Micro/Nano Optics International Conference 2017, Barcelona; 13.09.2017 - 15.09.2017; in: "Nanophotonics and Micro/Nano Optics International Conference 2017 Book of Abstracts", (2017), S. 124.

Zusätzliche Informationen

M.-H. Chien, M. Shawrav, H. D. Wanzenböck, S. Schmid:
"A Novel Platform for the Detection and Analysis of Plasmonic Nanostructures Based on Nanomechanical Resonator";
Poster: 16th International Workshop in Nanomechanical Sensors (NMC 2019), Lausanne; 19.06.2019 - 21.06.2019; in: "16th International Workshop on Nanomechanical Sensors", (2019), S. 85.

M.-H. Chien, M. Shawrav, H. D. Wanzenböck, S. Schmid:
"A Novel Platform for the Detection and Analysis of Plasmonic Nanostructures Based on Nanomechanical Resonator";
Poster: Conference on Lasers and Electro-Optics, San Jose, California United States; 05.05.2019 - 10.05.2019; in: "CLEO: Science and Innovations 2019", (2019), ISBN: 978-1-943580-57-6; S. 1 - 2.

Zusätzliche Informationen

M.-H. Chien, M. Shawrav, H. D. Wanzenböck, S. Schmid:
"Nanomechanical membrane resonator as a novel platform for the detection and analysis of FEBID plasmonic nanostructures​";
Vortrag: Nanophotonics and Micro/Nano Optics International Conference 2017, Barcelona; 13.09.2017 - 15.09.2017; in: "Nanophotonics and Micro/Nano Optics International Conference 2017 Book of Abstracts", (2017), S. 238.

Zusätzliche Informationen

M. Kurek, M. Carnoy, A. Boisen, S. Schmid:
"Perforated SiN membrane resonators for nanomechanical IR spectroscopy";
Poster: 42nd International Conference on Nano Engineering, MNE 2016, Wien; 19.09.2016 - 23.09.2016; in: "Proceedings MNE 2016", (2016), S. 161.

P. Larsen, M. Viehrig, S. Schmid, A. Boisen:
"Hollow MEMS - An integrated density, viscosity, buoyant mass and IR absorption spectrometry sensor";
Vortrag: 14th International Workshop on Nanomechanical Sensors NMC 2017, Kailua-Kona, Hawaii, USA; 04.04.2017 - 07.04.2017; in: "Talk Abstracts", (2017), S. 13.

N. Luhmann, A. Jachimowicz, J. Schalko, P. Sadeghi, M. Sauer, A. Foelske-Schmitz, S. Schmid:
"Effect of oxygen plasma on nanomechanical silicon nitride resonators";
Vortrag: 43rd International Conference on Micro and Nanoengineering (MNE), Braga, Portugal; 18.09.2017 - 22.09.2017; in: "43rd International Conference on Micro and Nanoengineering (MNE)", (2017), 1 S.

N. Luhmann, S. Schmid:
"Ultrathin Cu-Au films as broad spectral IR absorber for NEMS detectors";
Poster: 16th International Workshop in Nanomechanical Sensors (NMC 2019), Lausanne; 19.06.2019 - 21.06.2019; in: "16th International Workshop on Nanomechanical Sensors", (2019), S. 83.

L. Nguyen Quang, P. Larsen, S. Schmid, A. Boisen, S. Keller:
"IR spectroscopy with pyrolytic carbon string resonator as a tool for particle detection";
Poster: 14th International Workshop on Nanomechanical Sensors NMC 2017, Kailua-Kona, Hawaii, USA; 04.04.2017 - 07.04.2017; in: "Poster Abstracts", (2017), S. 23.

M. Piller, M.-H. Chien, N. Luhmann, S. Schmid:
"Nanomechanical IR detector";
Vortrag: 5th International IR WORKshop, Olching (eingeladen); 12.11.2018 - 13.11.2018; in: "IR WORKshop 2018 Proceedings", (2018), 1 S.

Zusätzliche Informationen

M. Piller, M.-H. Chien, N. Luhmann, S. Schmid:
"Sensitive nanomechanical thermal detector for IR and THz radiation at room-temperature";
Poster: 16th International Workshop in Nanomechanical Sensors (NMC 2019), Lausanne; 19.06.2019 - 21.06.2019; in: "16th International Workshop on Nanomechanical Sensors", (2019), S. 84.

M. Piller, M.-H. Chien, N. Luhmann, S. Schmid:
"Uncooled nanomechanical photodetector for broad spectral range measurements with picowatt sensitivity";
Poster: Eurosensors 2018, Graz; 09.09.2018 - 12.09.2018; in: "Proceedings - Eurosensors 2018, Graz", MDPI, Vol. 2 (2018), ISSN: 2504-3900.

Zusätzliche Informationen

P. Sadeghi, T. Rindzevicius, S. Schmid:
"Fabrication and characterization of Au dimer antennas on SiO2 pillars with enhanced plasmonic response";
Poster: 42nd International Conference on Nano Engineering, MNE 2016, Wien; 19.09.2016 - 23.09.2016; in: "Proceedings MNE 2016", (2016), S. 140.

P. Sadeghi, S. Schmid:
"Reducing surface loss at room temperature in nanomechanicalsilicon nitride resonators";
Poster: Frontiers of Nanomechanical Systems ( FNS/2019 ), Palm Springs; 10.02.2019 - 14.02.2019; in: "Frontiers of Nanomechanical Systems (FNS/2019)", (2019), S. 105.

Zusätzliche Informationen

P. Sadeghi, M. Tanzer, L. Christensen, S. Schmid:
"Influence of Clamp-Widening on the Quality Factor of Nanomechanical Silicon Nitride Resonators";
Poster: 16th International Workshop in Nanomechanical Sensors (NMC 2019), Lausanne; 19.06.2019 - 21.06.2019; in: "16th International Workshop on Nanomechanical Sensors", (2019), S. 61.

P. Sadeghi, K. Wu, T. Rindzevicius, A. Boisen, S. Schmid:
"Fabrication and characterization of Au dimer antennas on glass pillars with enhanced plasmonic response";
Poster: Nanophotonics and Micro/Nano Optics - NANOP 2016, Wien; 19.09.2016 - 23.09.2016; in: "Book of Abstracts - NANOP 2016", (2016), 1 S.

S. Schmid:
"Photothermal Nanomechanical Analysis of Single Molecules and Plasmonic Nanostructures";
Vortrag: 16th International Workshop in Nanomechanical Sensors (NMC 2019), Lausanne (eingeladen); 19.06.2019 - 21.06.2019; in: "NMC2019 16th International Workshop in Nanomechanical Sensors Engineering Workshop", (2019), S. 35.

M. Shawrav, N. Cazier, S. Waid, M. Schinnerl, H. D. Wanzenböck, S. Schmid:
"FIB investigations on FEBID based gold nanostructures";
Poster: 1st European FIB Network Workshop, Graz, Austria; 04.07.2017 - 05.07.2017; in: "1st European FIB Network Workshop", (2017), S. 107 - 108.

Zusätzliche Informationen

M. Shawrav, M.-H. Chien, S. Schmid, H. D. Wanzenböck:
"Impact of purity and conductivity on plasmonic response of FEBID gold nanostructures";
Vortrag: Focused Electron Beam Induced Processing Workshop (FEBIP), Modena; 10.07.2018 - 13.07.2018; in: "Book of Abstracts", (2018), S. 26 - 27.

Zusätzliche Informationen

M. Shawrav, M.-H. Chien, P. Taus, E. Bertagnolli, H. D. Wanzenböck, S. Schmid:
"An overview of in - situ and ex - situ purification strategies for FEBID gold nanostructures";
Vortrag: CELINA, Porto, Portugal (eingeladen); 16.09.2017; in: "4th annual meeting of the Chemistry for Electron-Induced Nanofabrication (CELINA), COST Action CM1301", (2017), S. 29.

Zusätzliche Informationen

M. Shawrav, M.-H. Chien, P. Taus, H. D. Wanzenböck, E. Bertagnolli, S. Schmid:
"Photothermal analysis of direct-write purified gold nanostructures with nanomechanical resonator";
Vortrag: 43rd International Conference on Micro and Nanoengineering (MNE), Braga, Portugal; 18.09.2017 - 22.09.2017; in: "43rd International Conference on Micro and Nanoengineering (MNE)", (2017), 1 S.

Zusätzliche Informationen

M. Shawrav, M.-H. Chien, P. Taus, H. D. Wanzenböck, S. Schmid:
"Photothermal analysis on direct-write nanostructures by nanomechanical scanning absorption microscopy";
Poster: 19th International Microscopy Congress IMC19, Sydney; 09.09.2018 - 14.09.2018; in: "abstracts imc19", (2018), 2 S.

Zusätzliche Informationen

M. Shawrav, M.-H. Chien, H. D. Wanzenböck, E. Bertagnolli, S. Schmid:
"Analysis of direct-write gold nanostructure-purification with nanomechanical scanning absorption microscopy";
Vortrag: nanoFIS 2017 - 3rd International Conference Functional Integrated nano Systems, Graz; 22.11.2017 - 24.11.2017; in: "nanoFIS 2017", (2017), S. 1.

Zusätzliche Informationen

M. Shawrav, M.-H. Chien, H. D. Wanzenböck, E. Bertagnolli, S. Schmid:
"Novel fabrication and characterization approach for plasmonic nanostructures";
Poster: Microelectronic Systems Symposium (MESS18), Vienna; 12.04.2018 - 13.04.2018; in: "MESS 18 Microelectronic Systems Symposium", OVE, 91 (2018), ISBN: 978-3-903249-01-1; 1 S.

Zusätzliche Informationen

M. Shawrav, M.-H. Chien, H. D. Wanzenböck, S. Schmid:
"Does gold purity affect plasmonic resonance? New route towards photothermal analysis of direct-write nanostructures";
Poster: 44th International Conference on Micro and Nanoengineering (MNE), Copenhagen; 24.09.2018 - 27.09.2018; in: "44th International Conference on Micro and Nanoengineering (MNE)", (2018), 1 S.

Zusätzliche Informationen

H. D. Wanzenböck, M. Shawrav, E. Bertagnolli, S. Schmid:
"Direct-write deposition of pure gold nanostructures - new possibilities and new challenges";
Vortrag: 61st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2017), Orlando, FL, USA; 30.05.2017 - 02.06.2017; in: "Conference Proceedings EIPBN 2017", (2017), 1 S.

Zusätzliche Informationen


Vorträge und Posterpräsentationen (ohne Tagungsband-Eintrag)


M.-H. Chien, M. Brameshuber, B. Rossboth, G. Schütz, S. Schmid:
"Single-molecule Optical Absorption Imaging by Nanomechanical Photothermal Sensing at Room Temperature";
Vortrag: Single-Molecule Sensors and NanoSystems International Conference - S3IC 2019, München; 03.04.2019 - 05.04.2019.

Zusätzliche Informationen

M. Rothbauer, H. Gondola, S. Schmid, J. Schalko, B. Huppertz, P. Ertl et al.:
"A Lab-on-a-chip with Integrated Impedance Sensors for Nanotoxicological Studies on Human Placental Cell Lines";
Poster: Microfluidics and Lab-on-a-Chip Technologies, Deutschland; 10.05.2017 - 11.05.2017.

Zusätzliche Informationen

P. Sadeghi, L. Villanueva, H. Kähler, S. Schmid:
"Frequency Fluctuations in NanomechanicalSilicon Nitride Resonators";
Poster: Frontiers of Nanomechanical Systems ( FNS/2019 ), Palm Springs; 10.02.2019 - 14.02.2019.

Zusätzliche Informationen

S. Schmid:
"Nanomechanical sensing";
Hauptvortrag: 10th Annual Workshop of the Norwegian PhD Network on Nanotechnology for Microsystems, Tromsø, Norway (eingeladen); 17.06.2019 - 19.06.2019.

M. Shawrav, M.-H. Chien, H. D. Wanzenböck, E. Bertagnolli, S. Schmid:
"Photo thermal analysis of FEBID gold nanostructures";
Poster: ASEM Workshop "Advanced Electron Microscopy", Wien; 26.04.2018 - 27.04.2018.


Dissertationen (eigene und begutachtete)


M.-H. Chien:
"Nanoelectromechanical photothermal microscopy and spectroscopy for single-molecule detection and imaging at room temperature";
Betreuer/in(nen), Begutachter/in(nen): S. Schmid, F. Vollmer, U. Schmid; E366, 2021; Rigorosum: 21.10.2021.

D. Dergez:
"Mechanical and Electrical Properties of Amorphous Silicon Nitride Thin Films for MEMS";
Betreuer/in(nen), Begutachter/in(nen): U. Schmid, P.M. Mayrhofer, S. Schmid; E366, 2017; Rigorosum: 18.12.2017.

M. Dorfmeister:
"Piezoelectrically Actuated Bistable MEMS Membranes for Acoustic Applications";
Betreuer/in(nen), Begutachter/in(nen): U. Schmid, A. Dehe, S. Schmid; E366, 2020; Rigorosum: 31.08.2020.

J. Hafner:
"Ferroelectric Polymer Thin Films for MEMS Applications - Towards soft and highspeed AFM probes";
Betreuer/in(nen), Begutachter/in(nen): U. Schmid, P. Hinterdorfer, S. Schmid; E366, 2021; Rigorosum: 25.02.2021.

A. Hajian:
"Wet chemical corosification of LTCC substrates for high frequency and catalyst support applications";
Betreuer/in(nen), Begutachter/in(nen): U. Schmid, D. De Ligny, S. Schmid; E366, 2020; Rigorosum: 27.10.2020.

M. Leitgeb:
"Photoelectrochemical Porosification of Silicon Carbide for MEMS";
Betreuer/in(nen), Begutachter/in(nen): U. Schmid, H. Seidel, S. Schmid; E366, 2018; Rigorosum: 27.04.2018.

G. Pfusterschmied:
"Performance of piezoelectric MEMS resonators in liquids";
Betreuer/in(nen), Begutachter/in(nen): U. Schmid, M. Kupnik, S. Schmid; E366, 2018; Rigorosum: 19.04.2018.

P. Sadeghi:
"Study of High-Q Nanomechanical Silicon Nitride Resonators";
Betreuer/in(nen), Begutachter/in(nen): S. Schmid, R. Norte, U. Schmid; E366, 2021; Rigorosum: 21.05.2021.

P. Schmid:
"Robuste Dünnschicht-Dehnmessstreifen für Hochtemperatur-Drucksensoren";
Betreuer/in(nen), Begutachter/in(nen): U. Schmid, A. Dietzel, S. Schmid; E366, 2020; Rigorosum: 20.10.2020.

E Wistrela:
"Herstellung und Charakterisierung von polykristallinen CrxAl1-xN Dünnfilmen für MEMS Anwendungen";
Betreuer/in(nen), Begutachter/in(nen): U. Schmid, G. Gerlach, S. Schmid; E366, 2020; Rigorosum: 21.08.2020.

C Zarfl:
"Robust Thin Film Strain Gauges for High Temperature Sensing Applications";
Betreuer/in(nen), Begutachter/in(nen): U. Schmid, H. Seidel, S. Schmid; E366, 2020; Rigorosum: 13.02.2020.


Diplom- und Master-Arbeiten (eigene und betreute)


M. Piller:
"Development of a nanomechanical membrane resonator for infrared and terahertz radiation detection";
Betreuer/in(nen): S. Schmid; E366, 2018; Abschlussprüfung: 22.11.2018.