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Publication list for
Michael Schneider
E366 - Institute of Sensor and Actuator Systems
as author or essentially involved person

175 records (2010 - 2021)


Books and Book Editorships

  1. U. Schmid, M. Schneider (ed.):
    "Piezoelectric MEMS";
    MDPI, Basel . Beijing . Wuhan . Barcelona . Belgrade, 2018, ISBN: 978-3-03897-005-7; 165 pages.
  2. M. Schneider (ed.):
    "Einfluss der Schichtdicke und der Substratvorbehandlung auf die elektromechanischen Eigenschaften von gesputterten Aluminiumnitriddünnfilmen";
    Verlag Dr. Hut, München, 2014, ISBN: 978-3-8439-1569-4; 177 pages.

Publications in Scientific Journals

  1. J. Hafner, S. Benaglia, F Richheimer, M. Teuschel, F. Maier, W. Artner, S. Wood, D. Platz, M. Schneider, K. Hradil, F. Castro, R. Garcia, U. Schmid:
    "Multi-scale characterisation of a ferroelectric polymer reveals the emergence of a morphological phase transition driven by temperature";
    Nature Communications, 12 (2021), Artikel 152; 1 - 9.
  2. J. Hafner, M. Teuschel, D. Disnan, M. Schneider, U. Schmid:
    "Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators";
    Materials Research Letters, 9 (2021), Issue 4; 195 - 203.
  3. J.N. Haus, M. Schwerter, M. Schneider, M. Gäding, M. Leester-Schädel, U. Schmid, A. Dietzel:
    "Robust Pressure Sensor in SOI Technology with Butterfly Wiring for Airfoil Integration";
    Sensors, 21 (2021), 6140; 1 - 12.
  4. F. Maier, M. Schneider, P. Ullmann, J. Hafner, U. Schmid:
    "α-phase PVDF MEMS cantilever excited by electrostriction and evaluated up to 160 °C in air by laser-Doppler vibrometry";
    Journal of Applied Physics, 129 (2021), Artikel 214507; 1 - 8.
  5. G. Pfusterschmied, F. Triendl, M. Schneider, U. Schmid:
    "Impact of Ar+ bombardment of 4H-SiC substrates on Schottky diode barrier heights";
    Materials Science in Semiconductor Processing, 123 (2021), 1 - 9.
  6. H. Watanabe, T. Chang, M. Schneider, U. Schmid, C. Chen, S. Iida, D. Yamane, H. Ito, K. Machida, K. Masu, M. Sone:
    "Effective Young´s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency";
    electrochem, 2 (2021), 216 - 223.
  7. F. Maier, M. Schneider, J. Schrattenholzer, W. Artner, K. Hradil, A. Artemenko, A. Kromka, U. Schmid:
    "Flexoelectricity in polycrystalline TiO2 thin films";
    Acta Materialia, 190 (2020), 124 - 129.
  8. F. Patocka, C. Schneidhofer, N. Dörr, M. Schneider, U. Schmid:
    "Novel MEMS Sensor for the Detection of Particles with Dielectric Properties in Aged Lubricating Oils";
    Sensors and Actuators A: Physical, 315 (2020), 1 - 13.
  9. G. Pfusterschmied, Chr. Weinmann, M. Schneider, D. Platz, N. Shen, J. E. Sader, U. Schmid:
    "Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquids";
    Journal of Micromechanics and Microengineering, 30 (2020), 1 - 7.
  10. P Schmid, F. Triendl, C Zarfl, S. Schwarz, W. Artner, M. Schneider, U. Schmid:
    "Influence of the AlN/Pt-ratio on the electro-mechanical properties ofmultilayered AlN/Pt thin film strain gauges at high temperatures";
    Sensors and Actuators A: Physical, 302 (2020), 1 - 7.
  11. M. Schneider, M. Dorfmeister, Ph. Moll, M. Kaltenbacher, U. Schmid:
    "Bi-Stable Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducer (PMUT)";
    Journal Of Microelectromechanical Systems, 29 (2020), 948 - 953.
  12. M. Schneider, G. Pfusterschmied, F. Patocka, U. Schmid:
    "High performance piezoelectric AlN MEMS resonators for precise sensing in liquids";
    E&I Elektrotechnik und Informationstechnik, 137 (2020), 3; 121 - 127.
  13. M. Schneider, G. Pfusterschmied, F. Patocka, U. Schmid:
    "MEMS Sensoren in hochviskosen Flüssigkeiten - Hohe Gütefaktoren durch maßgeschneiderte, piezoelektrische Resonatoren";
    GIT, 64. Jahrgang (2020), 4-5; 36 - 38.
  14. M. Dorfmeister, B. Kössl, M. Schneider, G. Pfusterschmied, U. Schmid:
    "Switching performance of bistable membranes activated with integrated piezoelectric thin film transducers";
    Journal of Micromechanics and Microengineering, 29 (2019), 1 - 11.
  15. M. Dorfmeister, M. Schneider, U. Schmid:
    "3D characterisation of piezoelectric bistable MEMS membranes during switching";
    Sensors and Actuators A: Physical, 298 (2019), 1 - 9.
  16. I. Gablech, V. Svatos, O. Caha, A. Dubroka, J. Pekarek, J. Klempa, P. Neuzil, M. Schneider, T. Sikola:
    "Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual Kaufman ion-beam source setup";
    Thin Solid Films, 670 (2019), 105 - 112.
  17. J. Hafner, J. Schrattenholzer, M. Teuschel, M. Schneider, D. Platz, U. Schmid:
    "Modelling the Distribution of BaTiO3 Nanoparticles in a P(VDF70-TrFE30) Polymer Matrix for Permittivity Calculation";
    Polymer, 180 (2019), 1 - 7.
  18. J. Hafner, M. Teuschel, M. Schneider, U. Schmid:
    "Origin of the strong temperature effect on the piezoelectric response of the ferroelectric (co-)polymer P(VDF70-TrFE30)";
    Polymer, 170 (2019), 1 - 6.
  19. A. Hajian, D. Müftüoglu, T. Konegger, M. Schneider, U. Schmid:
    "On the porosification of LTCC substrates with sodium hydroxide";
    Composites - Part B: Engineering, 157 (2019), 14 - 23.
  20. F. Patocka, M. Schlögl, C. Schneidhofer, N. Dörr, M. Schneider, U. Schmid:
    "Piezoelectrically Excited MEMS Resonators with Integrated Planar Coil for the Detection of Ferrous Particles in Liquids";
    Sensors and Actuators B: Chemical, 299 (2019), 1 - 7.
  21. F. Patocka, M. Schneider, N. Dörr, C. Schneidhofer, U. Schmid:
    "Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, twodimensional roof tile-shaped mode";
    Journal of Micromechanics and Microengineering, 29 (2019), 1 - 7.
  22. G. Pfusterschmied, F. Patocka, Chr. Weinmann, M. Schneider, D. Platz, U. Schmid:
    "Responsivity and sensitivity of piezoelectric MEMS resonators athigher order modes in liquids";
    Sensors and Actuators A: Physical, 295 (2019), 84 - 92.
  23. P Schmid, F. Triendl, C Zarfl, S. Schwarz, W. Artner, M. Schneider, U. Schmid:
    "Electro-mechanical Properties of Multilayered Aluminum Nitride and Platinum Thin Films at High Temperatures";
    Sensors and Actuators A: Physical, 293 (2019), 1 - 8.
  24. M. Schneider, L Stöber, J. Konrath, F. Patocka, U. Schmid:
    "Argon bombardment of 4H silicon carbide substrates for tailored Schottky diode barrier heights";
    Materials Science Forum, Volume 963 (2019), ISSN: 1662-9752; 506 - 510.
  25. F. Triendl, G. Fleckl, M. Schneider, G. Pfusterschmied, U. Schmid:
    "Evaluation of interface trap characterization methods in 4H-SiC metal oxide semiconductor structures over a wide temperature range";
    Journal of Vacuum Science & Technology B, 37 (2019), 0329031 - 0329038.
  26. G. Wachter, St Kuhn, S. Minniberger, C. Salter, P. Asenbaum, J. Millen, M. Schneider, J. Schalko, U. Schmid, A. Felgner, D. Hüser, Mark. Arndt, M. Trupke:
    "Silicon microcavity arrays with open access and a finesse of half a million";
    Light-Science & Applications, 8 (2019), 37; 1 - 7.
  27. M. Dorfmeister, M. Schneider, U. Schmid:
    "Static and dynamic performance of bistable MEMS membranes";
    Sensors and Actuators A: Physical, 282 (2018), 259 - 268.
  28. M. Fischeneder, A. Bittner, M. Schneider, U. Schmid:
    "Enhanced process stability for the low temperature sputter deposition of aluminium nitride thin films";
    Materials Research Express, 5 (2018), 1 - 7.
  29. M. Fischeneder, M. Kucera, F. Hofbauer, G. Pfusterschmied, M. Schneider, U. Schmid:
    "Q-factor enhancement of piezoelectric MEMS resonators in liquidswith active feedback";
    Sensors and Actuators B: Chemical, 260 (2018), 198 - 203.
  30. M. Fischeneder, M. Oposich, M. Schneider, U. Schmid:
    "Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films";
    Sensors, 18 (2018), 3842 - 3853.
  31. M. Gillinger, A. Markovic, G. Pfusterschmied, M. Schneider, U. Schmid:
    "Performance of thin AlxOy , SixNy and AlN passivation layers for high temperature SAW device applications";
    Materials Science in Semiconductor Processing, 81 (2018), 1 - 6.
  32. M. Gillinger, K. Shaposhnikov, T. Knobloch, M. Stöger-Pollach, W. Artner, K. Hradil, M. Schneider, M. Kaltenbacher, U. Schmid:
    "Enhanced c-axis orientation of aluminum nitride thin films by plasma-based pre-conditioning of sapphire substrates for SAW applications";
    Applied Surface Science, 435 (2018), 432 - 437.
  33. A. Hajian, M. Stöger-Pollach, M. Schneider, F. Crunwell, U. Schmid:
    "Porosification behaviour of LTCC substrates with potassium hydroxide";
    Journal of the European Ceramic Society, 38 (2018), 2369 - 2377.
  34. J. Iannacci, E. Serra, G. Sordo, M. Bonaldi, A. Borrielli, U. Schmid, A. Bittner, M. Schneider, T. Kuenzig, G. Schrag, G. Pandraud, P. M. Sarro:
    "MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensing";
    Microsystem Technologies - Micro- and Nanosystems - Information Storage and Processing Systems, 24 (2018), 5027 - 5036.
  35. M. Leitgeb, Ch. Zellner, M. Lukschanderl, M. Schneider, U. Schmid:
    "A Cellular Automaton Based Interpretation of Metal Assisted Photochemical Porosification of 4H-Silicon Carbide";
    Journal of the Electrochemical Society, 165 (2018), 325 - 329.
  36. P Schmid, C Zarfl, F. Triendl, F. Maier, S. Schwarz, M. Schneider, U. Schmid:
    "Impact of adhesion promoters and sputter parameters on theelectro-mechanical properties of Pt thin films at high temperatures";
    Sensors and Actuators A: Physical, 285 (2018), 149 - 157.
  37. E Wistrela, I. Schmied, M. Schneider, M. Gillinger, P.M. Mayrhofer, A. Bittner, U. Schmid:
    "Impact of sputter deposition parameters on the microstructural and piezoelectric properties of Cr x Al 1−x N thin films";
    Thin Solid Films, 648 (2018), 76 - 82.
  38. A. Camarda, G. Sordo, J. Iannacci, M. Schneider, U. Schmid, M. Tartagni, A. Romani:
    "Fabrication and Electromechanical Modelling of a Flexural-Mode MEMS Piezoelectric Transformer in AlN";
    Journal Of Microelectromechanical Systems, 26 (2017), 5; 1110 - 1121.
  39. M. Fischeneder, E Wistrela, A. Bittner, M. Schneider, U. Schmid:
    "Tailored wafer holder for a reliable deposition of sputtered aluminium nitride thin films at low temperatures";
    Materials Science in Semiconductor Processing, 71 (2017), 283 - 289.
  40. M. Leitgeb, Ch. Zellner, Chr. Hufnagl, M. Schneider, S. Schwab, H. Hutter, U. Schmid:
    "Stacked Layers of Different Porosity in 4H-SiC Substrates Applying a Photoelectrochemical Approach";
    Journal of the Electrochemical Society, 164 (2017), 12; 337 - 347.
  41. M. Leitgeb, Ch. Zellner, M. Schneider, U. Schmid:
    "Porous single crystalline 4H silicon carbide rugate mirrors";
    APL Materials, 5 (2017), 1061061 - 1061066.
  42. M. Leitgeb, Ch. Zellner, M. Schneider, S. Schwab, H. Hutter, U. Schmid:
    "Metal Assisted Photochemical Etching of 4H Silicon Carbide";
    Journal of Physics D: Applied Physics, 50 (2017), 1 - 10.
  43. G. Pfusterschmied, J. Toledo, M. Kucera, W. Steindl, S. Zemann, V Ruiz-Díez, M. Schneider, A. Bittner, J.L. Sànchez-Rojas, U. Schmid:
    "Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring";
    Micromachines, 8 (2017), 200; 1 - 12.
  44. P. Udvardi, J. Radó, A. Straszner, J. Ferencz, Z. Hajnal, S. Soleimani, M. Schneider, U. Schmid, P. Révész, J. Volk:
    "Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems";
    Micromachines, 8 (2017), 311; 1 - 13.
  45. E Wistrela, A. Bittner, M. Schneider, M. Reissner, U. Schmid:
    "Magnetic and Microstructural Properties of Sputter Deposited Cr-doped Aluminium Nitride Thin Films on Silicon Substrates";
    Journal of Applied Physics, 121 (2017), 1153021 - 1153027.
  46. D. Dergez, M. Schneider, A. Bittner, N. Pawlak, U. Schmid:
    "Mechanical and electrical properties of RF magnetron sputter deposited amorphous silicon-rich silicon nitride thin films";
    Thin Solid Films, 606 (2016), 7 - 12.
  47. T. Frischmuth, M. Schneider, I. Bogdanović Radović, Z. Siketić, D. Maurer, Th. Grille, U. Schmid:
    "Lowtemperature deposition of a-SiC:H thin films applying a dual plasma source process";
    Thin Solid Films, 616 (2016), 164 - 171.
  48. T. Frischmuth, M. Schneider, D. Maurer, Th. Grille, U. Schmid:
    "High temperature annealing effects on the chemical and mechanical properties of inductively-coupled plasma-enhanced chemical vapor deposited a-SiC:H thin films";
    Thin Solid Films, 611 (2016), 6 - 11.
  49. T. Frischmuth, M. Schneider, D. Maurer, Th. Grille, U. Schmid:
    "Inductively-coupled plasma-enhanced chemical vapour deposition ofhydrogenated amorphous silicon carbide thin films for MEMS";
    Sensors and Actuators A: Physical, 247 (2016), 647 - 655.
  50. M. Gillinger, K. Shaposhnikov, T. Knobloch, M. Kaltenbacher, U. Schmid, M. Schneider:
    "Impact of layer and substrate properties on the surface acoustic wave velocity in scandium doped aluminum nitride based SAW devices on sapphire";
    AIP Advances, 23 (2016), 108; 5 pages.
  51. M. Gillinger, K. Shaposhnikov, T. Knobloch, M. Schneider, M. Kaltenbacher, U. Schmid:
    "Impact of layer and substrate properties on the surface acoustic wave velocity in scandium doped aluminum nitride based SAW devices on sapphire";
    Applied Physics Letters, 108 (2016), 231601-1 - 231601-4.
  52. M. Leitgeb, A. Backes, Ch. Zellner, M. Schneider, U. Schmid:
    "Communication-The Role of the Metal-Semiconductor Junction in Pt-Assisted Photochemical Etching of Silicon Carbide";
    ECS Journal of Solid State Science and Technology, 5 (2016), 3; 148 - 150.
  53. M. Leitgeb, Ch. Zellner, M. Schneider, U. Schmid:
    "A Combination of Metal Assisted Photochemical and Photoelectrochemical Etching for Tailored Porosification of 4H SiC Substrates";
    ECS Journal of Solid State Science and Technology, 5 (2016), 10; 556 - 564.
  54. G. Pfusterschmied, M. Kucera, W. Steindl, T. Manzaneque, V Ruiz-Díez, A. Bittner, M. Schneider, J.L. Sànchez-Rojas, U. Schmid:
    "Roof tile-shaped modes in quasi free-free supported piezoelectricmicroplate resonators in high viscous fluids";
    Sensors and Actuators B: Chemical, 237 (2016), 999 - 1006.
  55. L Stöber, J. Konrath, V. Haberl, F. Patocka, M. Schneider, U. Schmid:
    "Nitrogen incorporation in sputter deposited molybdenum nitride thin films";
    Journal of Vacuum Science & Technology A, 34 (2016), Issue 2; 0215131 - 0215138.
  56. L Stöber, J. Konrath, F. Patocka, M. Schneider, U. Schmid:
    "Controlling 4H-SiC Schottky Barriers by Molybdenum and Molybdenum Nitride as Contact Materials";
    IEEE Transactions on Electron Devices, 63 (2016), 2; 578 - 583.
  57. E Wistrela, M. Schneider, A. Bittner, U. Schmid:
    "Impact of the substrate dependent polarity distribution in c‑axis oriented AlN thin films on the etching behaviour and the piezoelectric properties";
    Microsystem Technologies - Micro- and Nanosystems - Information Storage and Processing Systems, 22 (2016), 1691 - 1700.
  58. D. Dergez, M. Schneider, A. Bittner, U. Schmid:
    "Mechanical and electrical properties of DC magnetron sputter deposited amorphous silicon nitride thin films";
    Thin Solid Films, 589 (2015), 227 - 232.
  59. M. Gillinger, M. Schneider, A. Bittner, P. Nicolay, U. Schmid:
    "Impact of annealing temperature on the mechanical and electrical properties of sputtered aluminum nitride thin films";
    Journal of Applied Physics, 117 (2015).
  60. M. Schneider, A. Bittner, A. Klein, U. Schmid:
    "Impact of film thickness and temperature on the dielectric breakdown behavior of sputtered aluminum nitride thin films";
    Microelectronic Engineering, 140 (2015), 47 - 51.
  61. M. Schneider, A. Bittner, U. Schmid:
    "Impact of film thickness on the temperature-activated leakagecurrent behavior of sputtered aluminum nitride thin films";
    Sensors and Actuators A: Physical, 224 (2015), 177 - 184.
  62. M. Schneider, A. Bittner, U. Schmid:
    "Improved piezoelectric constants of sputtered aluminium nitride thin films by pre-conditioning of the silicon surface";
    Journal of Physics D: Applied Physics, 48 (2015).
  63. L Stöber, J. Konrath, S. Krivec, F. Patocka, S. Schwarz, A. Bittner, M. Schneider, U. Schmid:
    "Impact of sputter deposition parameters on molybdenum nitride thin film properties";
    Journal of Micromechanics and Microengineering, 25 (2015), 7; 07400101 - 07400111.
  64. R. Beigelbeck, M. Schneider, J. Schalko, A. Bittner, U. Schmid:
    "A two-step load-deflection procedure applicable to extract the Young's modulus and the residual tensile stress of circularly shaped thin-film diaphragms";
    Journal of Applied Physics, 116 (2014), 114905; 11490501 - 11490513.
  65. R. Derntl, M. Schneider, J. Schalko, A. Bittner, H.-J. Schmiedmayer, U. Schmid, M. Trupke:
    "Arrays of open, independently tunable microcavities";
    Optics Express, 22 (2014), 18; 2212001 - 2212010.
  66. M. Schneider, A. Bittner, U. Schmid:
    "Temperature dependant dielectric breakdown of sputter‑deposited AlN thin films using a time‑zero approach";
    Microsystem Technologies - Micro- and Nanosystems - Information Storage and Processing Systems, 20 (2014), 751 - 757.
  67. M. Schneider, A. Bittner, U. Schmid:
    "Thickness dependence of Young´s modulus and residual stress of sputtered aluminum nitride thin films";
    Applied Physics Letters, 105 (2014), 201912-1.
  68. A. Lugstein, M. Mijic, T. Burchhart, C. Zeiner, R. Langegger, M. Schneider, U. Schmid, E. Bertagnolli:
    "In situ monitoring of Joule heating effects in germanium nanowires by -Raman spectroscopy";
    Nanotechnology, 24 (2013), 1 - 5.
  69. A. Alamin Dow, H. Lin, M. Schneider, Ch. Petkov, A. Bittner, A. Ahmed, C. Popov, U. Schmid, N. Kherani:
    "Ultrananocrystalline Diamond-Based High-Velocity SAW Device Fabricated by Electron Beam Lithography";
    IEEE Transactions on Nanotechnology, 11 (2012), 5; 979 - 984.
  70. A. Alamin Dow, M. Schneider, D. Koo, H. Al-Rubaye, A. Bittner, U. Schmid, N. Kherani:
    "Modeling the performance of a micromachined piezoelectric energy harvester";
    Microsystem Technologies - Micro- and Nanosystems - Information Storage and Processing Systems, 18 (2012), 1035 - 1043.
  71. M. Schneider, A. Bittner, F. Patocka, M. Stöger-Pollach, E. Halwax, U. Schmid:
    "Impact of the surface-near silicon substrate properties on the microstructure of sputter-deposited AIN thin films";
    Applied Physics Letters, 101 (2012), 221602-1 - 221602-4.
  72. M. Schneider, T. Strunz, A. Bittner, U. Schmid:
    "Impact of Sputter Deposition Parameters on the Leakage Current Behavior of Aluminum Nitride Thin Films";
    Advances in Science and Technology, 77 (2012), 29; 29 - 34.
  73. A. Alamin Dow, H. Al-Rubaye, D. Koo, M. Schneider, A. Bittner, U. Schmid, N. Kherani:
    "Modeling and Analysis of a Micromachined Piezoelectric Energy Harvester Stimulated by Ambient Random Vibrations";
    Proceedings of SPIE, 8066 (2011), 1 - 7.
  74. J. Schalko, R. Beigelbeck, M. Stifter, M. Schneider, A. Bittner, U. Schmid:
    "Improved Load-Deflection Method for the Extraction of Elastomechanical Properties of Circularly-Shaped Thin-Film Diaphragms";
    Proceedings of SPIE, 8066 (2011), 1 - 8.
  75. A. Deutschinger, U. Schmid, M. Schneider, W. Brenner, H. D. Wanzenböck, B. Volland, T. Ivanov, I. Rangelow:
    "Characterization of an electro-thermal micro gripper and tip sharpening using FIB technique";
    Microsystem Technologies - Micro- and Nanosystems - Information Storage and Processing Systems, 16 (2010), 11; 1901 - 1908.

Contributions to Books

  1. M. Fischeneder, M. Oposich, M. Schneider, U. Schmid:
    "Active Q-factor Control of Piezoelectric MEMS Cantilevers for High Speed AFM Applications in Vacuum";
    in: "Microsystems Technology in Germany 2018 / Mikrosystemtechnik in Deutschland 2018", trias Consult, Berlin, 2018, ISSN: 2191-7183, 36 - 37.
  2. M. Schneider, A. Bittner, M. Kucera, U. Schmid:
    "Piezoelektrische MEMS Sensoren zur Viskositäts- und Dichtebestimmung von technischen Flüssigkeiten";
    in: "Automobil-Sensorik", Springer-Verlag, Berlin-Heidelberg, 2016, ISBN: 978-3-662-48943-7, 353 - 372.

Talks and Poster Presentations (with Proceedings-Entry)

  1. Ph. Moll, G. Pfusterschmied, M. Schneider, M. Dorfmeister, U. Schmid:
    "Piezoelectric Switching Of Bistable Mems Membranes In Fluids";
    Talk: IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), online; 2021-01-25 - 2021-01-29; in: "2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)", IEEE, (2021), ISBN: 978-1-6654-1912-3; 544 - 547.
  2. F. Maier, M. Schneider, J. Schrattenholzer, U. Schmid:
    "Electrical and Microstructural Characterization of TiO2 Thin Films for Flexoelectric Devices";
    Talk: 30th Micromechanics and Microsystems Europe Workshop (MME) 2019, Wolfson College, Oxford, United Kingdom; 2019-08-18 - 2019-08-20; in: "Journal of Physics: Conference Series 1837", Journal of Physics: Conference Series, 1837 (2021), ISSN: 1742-6596; 1 - 7.
  3. M. Schlögl, M. Schneider, U. Schmid:
    "Design and Simulation of a Scalable Hybrid Energy Harvesting Device for Low Frequency Rotations";
    Talk: 30th Micromechanics and Microsystems Europe Workshop (MME) 2019, Wolfson College, Oxford, United Kingdom; 2019-08-18 - 2019-08-20; in: "Journal of Physics: Conference Series", Journal of Physics: Conference Series, 1837 (2021), ISSN: 1742-6596; 1 - 4.
  4. J. Hafner, S. Benaglia, M. Teuschel, D. Platz, M. Schneider, R. Garcia, U. Schmid:
    "Multi-scale characterisation of a semi-crystalline polymer reveals hidden ferroelectricity above the Curie transiton";
    Talk: 8th Multifrequency AFM conference, Madrid; 2020-10-27 - 2020-10-30; in: "8th Multifrequency AFM conference, Book of Abstracts", (2020), 107.
  5. J. Hafner, D. Canena, D. Platz, M. Schneider, P. Hinterdorfer, U. Schmid:
    "Scanning Probes with High Resonance Frequency and Low Stiffness for High-speed AFM Applications in Liquid Environments";
    Talk: 8th Multifrequency AFM conference, Madrid; 2020-10-27 - 2020-10-30; in: "8th Multifrequency AFM conference, Book of Abstracts", (2020), 28.
  6. G. Pfusterschmied, Chr. Weinmann, M. Schneider, M. Hospodka, J. Mirwald, B. Hofko, U. Schmid:
    "Bestimmung der dynamischen Viskosität von Bitumenderivaten bis 64000 mPa∙s mit piezoelektrischen MEMS-Resonatoren";
    Talk: MikroSystemTechnik Kongress 2019, Berlin, D; 2019-10-28 - 2019-10-30; in: "MikroSystemTechnik Kongress 2019 - Proceedings", VDE Verlag GMBH, (2019), ISBN: 978-3-8007-5090-0; 320 - 323.
  7. M. Schneider, J. Weißenbach, U. Schmid:
    "Einfluss von Substrattemperatur und Bias-Spannung auf die Eigenschaften von gesputterten AlN Dünnfilmen für BAWs";
    Talk: MikroSystemTechnik Kongress 2019, München, Deutschland; 2019-10-28 - 2019-10-30; in: "MikroSystemTechnik Kongress 2017 - Proceedings", VDE Verlag GMBH, (2019), ISBN: 978-3-8007-5090-0; 60 - 63.
  8. F. Maier, M. Schneider, J. Schrattenholzer, U. Schmid:
    "Electrical and Microstructural Characterization of TiO2 Thin Films for Flexoelectric Devices";
    Talk: MME 2019 - 30th Micromechanics and Microsystems Europe workshop, Oxford; 2019-08-18 - 2019-08-20; in: "MME 2019 - 30th Micromechanics and Microsystems Europe workshop", (2019), 1 - 7.
  9. M. Schlögl, M. Schneider, U. Schmid:
    "Design and Simulation of a Scalable Hybrid Energy Harvesting Device for Low Frequency Rotations";
    Talk: MME 2019 - 30th Micromechanics and Microsystems Europe workshop, Oxford; 2019-08-18 - 2019-08-20; in: "MME 2019 - 30th Micromechanics and Microsystems Europe workshop", (2019), 1 - 4.
  10. M. Dorfmeister, M. Schneider, U. Schmid:
    "A Bistable Ultrasonic Mems Device With An Integrated Piezoelectric Scandium-Aln Thin Film Actuator For Switching";
    Talk: 20th International Conference on Solid State Sensors, Actuators and Microsystems & Eurosensors XXXIII (Transducers & Eurosensors XXXIII), Berlin, D; 2019-06-23 - 2019-06-27; in: "20th International Conference on Solid State Sensors and Actuators (Transducers 19)", IEEE, CFP19SSA-ART (2019), ISBN: 978-1-5386-8104-6; 853 - 856.
  11. U. Schmid, M. Schneider:
    "High Performance Piezoelectric AlN MEMS Resonators for Liquid Sensing and Beyond - The Potential of PiezoMEMS";
    Talk: 20th International Conference on Solid State Sensors, Actuators and Microsystems & Eurosensors XXXIII (Transducers & Eurosensors XXXIII), Berlin, D (invited); 2019-06-23 - 2019-06-27; in: "20th International Conference on Solid State Sensors and Actuators (Transducers 19)", IEEE, CFP19SSA-ART (2019), ISBN: 978-1-5386-8104-6; 653 - 654.
  12. F. Patocka, M. Schlögl, M. Schneider, C. Schneidhofer, N. Dörr, U. Schmid:
    "MEMS Sensor for Monitoring the Degradation of Lubricating Oils";
    Talk: 7th European Conference on Tribology (Ecotrib 2019), Wien; 2019-06-12 - 2019-06-14; in: "7th European Conference on Tribology (Ecotrib 2019) - Book of Abstracts", (2019), ISBN: 978-3-901657-60-3; 138 - 139.
  13. U. Schmid, M. Schneider:
    "Aluminium Nitride based Piezoelectric MEMS: From Material Aspects to Low Power Devices";
    Talk: 46th International Conference on Metallurgical Coatings and Thin Films, San Diego, USA (invited); 2019-05-19 - 2019-05-24; in: "46th International Conference on Metallurgical Coatings and Thin Films", (2019), 1.
  14. U. Schmid, M. Schneider:
    "Advanced Aluminium Nitride Thin Films for Piezoelectric MEMS";
    Keynote Lecture: Surfcoat Korea 2019, Incheon, Korea (invited); 2019-03-27 - 2019-03-29; in: "Surfcoat Korea 2019 - Book of Abstracts", (2019), 31.
  15. G. Pfusterschmied, Chr. Weinmann, M. Hospodka, B. Hofko, M. Schneider, U. Schmid:
    "Sensing Fluid Properties Of Super High Viscous Liquids Using Non-Conventional Vibration Modes In Piezoelectrically Excited Mems Resonators";
    Poster: 32nd International Conference on Micro Electro Mechanical Systems (MEMS), Seoul, Korea; 2019-01-27 - 2019-01-31; in: "2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)", IEEE, (2019), 735 - 738.
  16. M. Schneider, U. Schmid:
    "Piezoelectric MEMS Devices: from Material Aspects to Low-Power Applications";
    Talk: 22nd International Conference on Advanced Materials and Simulation, Rom, Italien (invited); 2018-12-10 - 2018-12-12; in: "22nd International Conference on Advanced Materials and Simulation", (2018), ISSN: 2471-9838; 41 - 42.
  17. F. Patocka, M. Schneider, C. Schneidhofer, N. Dörr, U. Schmid:
    "Novel MEMS Sensor for Real-time Lubricant Condition Monitoring";
    Talk: ÖTG-Symposium 2018 - Tribologie in Industrie und Forschung: Neue Aufgaben - Quo Vadis?, Wien; 2018-11-22; in: "ÖTG-Symposium 2018", ÖTG, (2018), 115 - 122.
  18. U. Schmid, M. Schneider:
    "Piezoelectric MEMS: Materials, Devices and Applications";
    Talk: 16th International Conference on Plasma Surface Engineering (PSE 2018), Garmisch-Partenkirchen, Deutschland (invited); 2018-09-17 - 2018-09-21; in: "16th International Conference on Plasma Surface Engineering (PSE 2018)", (2018), 1.
  19. M. Dorfmeister, B. Kössl, M. Schneider, U. Schmid:
    "A Novel Bistable MEMS Membrane Concept Based on an Integrated AlN Thin Film for Switching";
    Talk: Eurosensors 2018, Graz, Österreich; 2018-09-09 - 2018-09-12; in: "Proceedings - Eurosensors 2018, Graz", MDPI, Vol. 2 (2018), ISSN: 2504-3900; 1 - 4.
  20. J. Hafner, M. Teuschel, J. Schrattenholzer, M. Schneider, U. Schmid:
    "Optimized Batch Process for Organic MEMS Devices";
    Talk: Eurosensors 2018, Graz, Österreich; 2018-09-09 - 2018-09-12; in: "Proceedings - Eurosensors 2018, Graz", MDPI, (2018), ISSN: 2504-3900; 1 - 4.
  21. M. Leitgeb, Ch. Zellner, M. Dorfmeister, M. Schneider, U. Schmid:
    "Buckling Porous SiC Membranes";
    Talk: Eurosensors 2018, Graz, Österreich; 2018-09-09 - 2018-09-12; in: "Proceedings - Eurosensors 2018, Graz", MDPI, (2018), ISSN: 2504-3900; 1 - 4.
  22. F. Patocka, M. Schlögl, M. Schneider, U. Schmid:
    "Novel MEMS Sensor for Detecting Magnetic Particles in Liquids";
    Talk: Eurosensors 2018, Graz, Österreich; 2018-09-09 - 2018-09-12; in: "Proceedings - Eurosensors 2018, Graz", MDPI, (2018), ISSN: 2504-3900; 1 - 4.
  23. M. Schneider, L Stöber, J. Konrath, F. Patocka, U. Schmid:
    "Argon Bombardment of 4H Silicon Carbide Substrates for Tailored Schottky Diode Barrier Heights";
    Poster: 12th European Conference on Silicon Carbide and Related Materials - ECSCRM, Bimingham, UK; 2018-09-02 - 2018-09-06; in: "12th European Conference on Silicon Carbide and Related Materials - ECSCRM", (2018), 1 - 2.
  24. M. Schneider, U. Schmid:
    "Substrate Temperature and Bias Voltage Dependent Properties of Sputtered AlN Thin Films for BAW Applications";
    Talk: The 18th IEEE International Conferene on Nanotechnology (ieee nano 2018), Cork, Irland; 2018-07-23 - 2018-07-26; in: "Proceedngs of the 18th IEEE International Conferene on Nanotechnology (ieee nano 2018)", IEEE, (2018), ISBN: 978-1-5386-5336-4; 420 - 425.
  25. A. Hajian, D. Müftüoglu, M. Schneider, U. Schmid:
    "Investigating the Effect of Etching Parameters on the Porosification of LTCC with Sodium Hydroxide";
    Poster: XVI Electroceramics Conference, Hasselt, Belgien; 2018-07-09 - 2018-07-12; in: "Electroceramics XVI", (2018), 174.
  26. A. Hajian, M. Stöger-Pollach, M. Schneider, H. Homolka, D. Müftüoglu, U. Schmid:
    "Effect of sintering temperature on porosification behavior of fired LTCC substrates";
    Talk: 42nd International Conference & Exposition on Advanced Ceramics & Composites, Daytona Beach, Florida, USA; 2018-01-21 - 2018-01-26; in: "Abstract Book", (2018), 144.
  27. A. Camarda, M. Tartagni, G. Sordo, J. Iannacci, M. Schneider, U. Schmid, A. Romani:
    "Smoothing The Way Towards Miniaturized MEMS AlN-based Piezoelectric Transformers";
    Talk: IEEE Sensors 2017, Glasgow, Schottland; 2017-10-29 - 2017-11-01; in: "IEEE Sensors 2017 - Proceedings", IEEE, (2017), ISBN: 978-1-5090-1012-7; 1 - 3.
  28. J. Toledo, V Ruiz-Díez, J.L. Sànchez-Rojas, G. Pfusterschmied, M. Schneider, U. Schmid:
    "Wine Fermentation Sensor Based on Piezoelectric Resonators";
    Talk: IEEE Sensors 2017, Glasgow, Schottland; 2017-10-29 - 2017-11-01; in: "IEEE Sensors 2017 - Proceedings", IEEE, (2017), ISBN: 978-1-5090-1012-7; 1 - 3.
  29. M. Dorfmeister, R. Pfister, M. Schneider, U. Schmid:
    "Analytische Modellierung von kreisförmigen, bistabilen Membranen mit unterschiedlichen, geometrischen Abmessungen";
    Talk: MikroSystemTechnik Kongress 2017, München, Deutschland; 2017-10-23 - 2017-10-25; in: "MikroSystemTechnik Kongress 2017 - Proceedings", VDE Verlag GMBH, (2017), ISBN: 978-3-8007-4491-6; 727 - 730.
  30. M. Fischeneder, M. Oposich, M. Schneider, U. Schmid:
    "Aktive Q-Faktor Regelung von piezoelektrischen MEMS Cantilevern für High Speed AFM Anwendungen in Vakuum";
    Talk: MikroSystemTechnik Kongress 2017, München, Deutschland; 2017-10-23 - 2017-10-25; in: "MikroSystemTechnik Kongress 2017 - Proceedings", VDE Verlag GMBH, (2017), ISBN: 978-3-8007-4491-6; 112 - 115.
  31. G. Pfusterschmied, M. Kucera, W. Steindl, A. Bittner, M. Schneider, U. Schmid:
    "Überwachung der Dichteänderung während der Weinfermentation mit piezoelektrischen MEMS-Resonatoren";
    Talk: MikroSystemTechnik Kongress 2017, München, Deutschland; 2017-10-23 - 2017-10-25; in: "MikroSystemTechnik Kongress 2017 - Proceedings", VDE Verlag GMBH, (2017), ISBN: 978-3-8007-4491-6; 183 - 186.
  32. M. Fischeneder, M. Oposich, M. Schneider, U. Schmid:
    "Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films";
    Talk: Eurosensors 2017, Paris, Frankreich; 2017-09-03 - 2017-09-06; in: "Proceedings of Eurosensors 2017, Paris", MDPI, Vol. 1/ Iss. 4 (2017), ISSN: 2504-3900; 1 - 5.
  33. M. Gillinger, T. Knobloch, M. Schneider, U. Schmid:
    "Harsh Environmental Surface Acoustic Wave Temperature Sensor Based on Pure and Scandium doped Aluminum Nitride on Sapphire";
    Talk: Eurosensors 2017, Paris, Frankreich; 2017-09-03 - 2017-09-06; in: "Proceedings of Eurosensors 2017, Paris", MDPI, Vol. 1/ Iss. 4 (2017), ISSN: 2504-3900; 1 - 4.
  34. M. Leitgeb, Ch. Zellner, M. Schneider, U. Schmid:
    "Porous Silicon Carbide for MEMS";
    Talk: Eurosensors 2017, Paris, Frankreich; 2017-09-03 - 2017-09-06; in: "Proceedings - Eurosensors 2017, Paris", MDPI, Vol. 1/ Iss. 4 (2017), ISSN: 2504-3900; 1 - 4.
  35. M. Schneider, M. DeMiguel-Ramos, A. J. Flewitt, E. Iborra, U. Schmid:
    "Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators";
    Talk: Eurosensors 2017, Paris, Frankreich; 2017-09-03 - 2017-09-06; in: "Proceedings of Eurosensors 2017, Paris", MDPI, Vol. 1/ Iss. 4 (2017), ISSN: 2504-3900; 1 - 4.
  36. T. Frischmuth, M. Schneider, Th. Grille, U. Schmid:
    "FT-IR analysis of high temperature annealing effects in a-SiC:H thin films";
    Talk: SPIE Microtechnologies 2017, Barcelnoa, Spanien; 2017-05-08 - 2017-05-10; in: "Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII", SPIE, (2017), ISSN: 1996-756x; Paper ID 102460R, 6 pages.
  37. G. Pfusterschmied, M. Kucera, Chr. Weinmann, M. Schneider, A. Bittner, J.L. Sànchez-Rojas, U. Schmid:
    "Two-step Procedure for Multi-Mode MEMS Resonator-Based Sensing of Fluid Properties";
    Talk: MEMS 2017, Las Vegas, USA; 2017-01-22 - 2017-01-26; in: "IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) 2017", IEEE, (2017), ISBN: 9781509050796; 1013 - 1016.
  38. J. Iannacci, G. Sordo, M. Schneider, U. Schmid, A. Camarda, A. Romani:
    "A Novel Toggle-Type MEMS Vibration Energy Harvester for Internet of Things Applications";
    Poster: Sensors 2016, Orlando, Florida, USA; 2016-10-30 - 2016-11-02; in: "Proceedings of the IEEE Sensors 2016", IEEE, (2016), ISBN: 978-1-4799-8287-5; 3 pages.
  39. G. Pfusterschmied, M. Kucera, J. Toledo, W. Steindl, V Ruiz-Díez, A. Bittner, M. Schneider, J.L. Sànchez-Rojas, U. Schmid:
    "Wine Fermentation Monitoring Using Piezoelectric MEMS Resonators";
    Poster: The 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2016), Dublin, Irland; 2016-10-09 - 2016-10-13; in: "Proceedings of the 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2016)", IEEE, (2016), 2 pages.
  40. T. Frischmuth, A. Klein, M. Schneider, Th. Grille, U. Schmid:
    "Fracture analysis of a-SiC:H membranes after thermal annealing";
    Poster: 30th Eurosensors Conference, EUROSENSORS 2016, Budapest, Hungary; 2016-09-04 - 2016-09-07; in: "Proceedings of the Eurosensors 2016", Procedia Engineering / Elsevier, 168 (2016), ISSN: 1877-7058; 1164 - 1167.
  41. M. Jandak, T. Neuzil, M. Schneider, U. Schmid:
    "Investigation on different damping mechanisms on the Q factor of MEMS resonators";
    Talk: 30th Eurosensors Conference, EUROSENSORS 2016, Budapest, Hungary; 2016-09-04 - 2016-09-07; in: "Proceedings of the Eurosensors XXX", Procedia Engineering / Elsevier, 168 (2016), ISSN: 1877-7058; 929 - 932.
  42. P.M. Mayrhofer, E Wistrela, M. Schneider, A. Bittner, U. Schmid:
    "Precise determination of d33 and d31 from piezoelectric deflection measurements and 2D FEM simulations applied to ScxAl1-xN";
    Poster: 30th Eurosensors Conference, EUROSENSORS 2016, Budapest, Hungary; 2016-09-04 - 2016-09-07; in: "Proceedings of the Eurosensors 2016", Procedia Engineering / Elsevier, 168 (2016), ISSN: 1877-7058; 876 - 879.
  43. M. Leitgeb, Ch. Zellner, M. Schneider, U. Schmid:
    "Metal assisted Chemical Etching of Monocystalline Silicon Carbide";
    Poster: nanoFIS 2016 - 2nd International Conference on Functional integrated nano Systems, Graz; 2016-06-27 - 2016-06-29; in: "nanoFIS 2016 - 2nd International Conference on Functional integrated nano Systems", (2016).
  44. P.M. Mayrhofer, C. Rehlendt, A. Bittner, M. Schneider, U. Schmid:
    "Scandium Aluminium Nitride for MEMS Applications";
    Talk: nanoFIS 2016 - 2nd International Conference on Functional integrated nano Systems, Graz; 2016-06-27 - 2016-06-29; in: "nanoFIS 2016 - 2nd International Conference on Functional integrated nano Systems", (2016).
  45. M. Schneider, A. Bittner, U. Schmid:
    "Improved Piezoelectric Coefficients in Ultra-thin Aluminum Nitride Thin Films";
    Talk: 3rd International Conference on Nanogenerators and Piezotronics (NGPT 2016), Rom, Italy; 2016-06-15 - 2016-06-17; in: "The 3rd International Conference on Nanogenerators and Piezotronics (NGPT 2016)", UniversItalia Roma, (2016), ISBN: 978-88-6507-929-4; 39.
  46. A. Klein, T. Frischmuth, M. Schneider, Th. Grille, U. Schmid:
    "Einfluss der Schichtdicke auf das mechanische Verhalten und die Bruchstabilität von a-SiC:H Membranen";
    Talk: MESS16 - Microelectronic Systems Symposium, Wien; 2016-04-28 - 2016-04-29; in: "OVE Schriftenreihe", Schriftenreihe OVE, 83 (2016), ISBN: 978-3-85133-089-2; 20.
  47. T. Frischmuth, M. Schneider, D. Maurer, Th. Grille, U. Schmid:
    "Impact of thermal treatment on the residual stress and Young´s modulus of thin a-SiC:H membranes applying bulge testing";
    Talk: Eurosensors XXIX, Freiburg, D; 2015-10-06 - 2015-10-09; in: "Proceedings of Eurosensors XXIX", Procedia Engineering, Vol. 120 (2015), ISSN: 1877-7058; 752 - 755.
  48. L Stöber, M. Schneider, U. Schmid:
    "Impact of Contact Material Deposition Technique on the Properties of Ti/4H-SiC Schottky Structures";
    Poster: ICSCRM 2015 - 16th International Conference on Silicon Carbide and Related Materials, Giardini Naxos, Italy; 2015-10-04 - 2015-10-09; in: "ICSCRM 2015 - 16th International Conference on Silicon Carbide and Related Materials", (2015), ISBN: 978-3-0357-1042-7; 569 - 572.
  49. T. Frischmuth, D. Maurer, M. Schneider, Th. Grille, U. Schmid:
    "IMPACT OF SUBSTRATE TEMPERATURE AND INDUCTIVELY COUPLED PLASMA POWER ON a-SiC:H THIN FILM PROPERTIES";
    Talk: MME 2015 - 26th MicroMechanics Europe Workshop, Toledo, Spanien; 2015-09-20 - 2015-09-23; in: "MME 2015 - 26th MicroMechanics Europe Workshop", (2015).
  50. L Stöber, J. Konrath, V. Haberl, M. Schneider, U. Schmid:
    "High Temperature Behaviour of Sputter Deposited Molybdenum Nitride Thin Films";
    Poster: MME 2015 - 26th MicroMechanics Europe Workshop, Toledo, Spanien; 2015-09-20 - 2015-09-23; in: "MME 2015 - 26th MicroMechanics Europe Workshop", (2015).
  51. M. Gillinger, M. Schneider, A. Bittner, P. Nicolay, U. Schmid:
    "High temperature performance of sputter-deposited piezoelectric aluminum nitride thin films";
    Talk: Smart Sensors, Actuators and MEMS VII - 2015, Barcelona, Spain; 2015-05-04 - 2015-05-06; in: "Proc. of SPIE Vol. 9517-9520", SPIE, 9517 (2015), ISSN: 0277-786x; Paper ID 951707, 8 pages.
  52. G. Sordo, J. Iannacci, E. Serra, M. Bonaldi, A. Borrielli, M. Schneider, U. Schmid:
    "Study on the performance of tailored spring elements for piezoelectric MEMS energy harvesters";
    Talk: 2015 XVIII AISEM Annual Conference, Trento, Italy; 2015-02-03 - 2015-02-05; in: "2015 XVIII AISEM Annual Conference", IEEE, (2015), ISBN: 978-1-4799-8591-3.
  53. R. Beigelbeck, M. Schneider, M. Stifter, T. Voglhuber-Brunnmaier, B. Jakoby, U. Schmid, F. Keplinger:
    "Novel exact closed-form solutions for the resonant frequencies and mode-shapes of Euler-Bernoulli beams with constant thickness and polynomial width";
    Talk: 64. Jahrestagung der Österreichischen Physikalischen Gesellschaft, Pöllau; 2014-09-24 - 2014-09-27; in: "Tagungsband - 64. Jahrestagung der ÖPG", (2014).
  54. T. Frischmuth, M. Schneider, Th. Grille, U. Schmid:
    "Effect of Reactive Gas Flow Ratio on IC-PECVD Deposited a-SiC:H Thin Films";
    Poster: EUROSENSORS 2014 - 28th European Conference on Solid-State Transducers, Brescia, I; 2014-09-07 - 2014-09-10; in: "Procedia Engineering", Elsevier, 87 (2014), ISSN: 1877-7058; 128 - 131.
  55. M. Schneider, A. Bittner, P Schmid, U. Schmid:
    "Impact of c-axis orientation of aluminium nitride thin films on the long-term stability and mechanical properties of resonantly excited MEMS cantilevers";
    Talk: EUROSENSORS 2014 - 28th European Conference on Solid-State Transducers, Brescia, I; 2014-09-07 - 2014-09-10; in: "Procedia Engineering", Elsevier, 87 (2014), ISSN: 1877-7058; 1493 - 1496.
  56. R. Beigelbeck, M. Stifter, M. Schneider, F. Keplinger, U. Schmid, T. Voglhuber-Brunnmaier, B. Jakoby:
    "Rigorous Analytical Analysis of Resonant Euler-Bernoulli Beams with Constant Thickness and Polynomial Width";
    Talk: IEEE Ultrasonics Symposium, Illinois, USA; 2014-09-03 - 2014-09-06; in: "2014 IEEE Ultrasonics Symposium Proceedings", IEEE, (2014), 2095 - 2099.
  57. L Stöber, J. Konrath, M. Schneider, U. Schmid:
    "Usability of Molybdenum and Molybdenum Nitride Thin Films for Microsystem Applications";
    Talk: MME 2014 - 25th Micromechanics and Microsystems Europe workshop, Istanbul, Türkei; 2014-08-31 - 2014-09-03; in: "MME 2014 - 25th Micromechanics and Microsystems Europe workshop", (2014), 1 - 4.
  58. J. Iannacci, E. Serra, G. Sordo, M. Bonaldi, A. Borielli, U. Schmid, A. Bittner, M. Schneider, T. Kuenzig, G. Schrag, G. Pandraud, P. Sarro:
    "MEMS Based Multi Modal Vibration Energy Harvesters for Ultra Low Power Autonomous Remote and Distributed Sensing";
    Talk: Mechatronics 2014, Karlstad, Sweden; 2014-06-16 - 2014-06-18; in: "Proceedings of the 14th Mechatronics Forum International Conference", (2014), 1 - 8.
  59. M. Schneider, A. Bittner, U. Schmid:
    "Investigation on the Dielectric Behavior of Aluminum Nitride Thin Films at Different Temperatures Applying a Time-zero Approach";
    Talk: SPIE Microtechnologies 2013, Grenoble, France; 2013-04-24 - 2013-04-26; in: "Proceedings of SPIE", 8763 (2013), ISSN: 0277-786x.
  60. M. Schneider, A. Bittner, U. Schmid, R. Beigelbeck, J. Schalko, M. Stifter:
    "Experimentelle Verifikation eines verbesserten Bulge-Test Modells zur elastomechanischen Charakterisierung von runden Aluminiumnitrid- und Siliziumnitridmembranen";
    Talk: Mikroelektronik Tagung ME12, Wien; 2012-04-23 - 2012-04-24; in: "ME Tagung 2012", Schriftenreihe des Öst erreichischen Verbands für Elektrotechnik, (2012), 56 - 60.

Talks and Poster Presentations (without Proceedings-Entry)

  1. U. Schmid, J. Hafner, G. Pfusterschmied, D. Platz, M. Schneider:
    "High Performance Piezoelectric MEMS Resonators in Fluids";
    Talk: XXII. Linz Winter Workshop 2020, Linz (invited); 2020-02-01 - 2020-02-03.
  2. U. Schmid, M. Schneider:
    "Piezoelectric Microsystems: Material Aspects, Devices and Applications";
    Keynote Lecture: 4th International Electronic Conference on Sensors and Applications (ECSA 2017), online (invited); 2017-11-15 - 2017-11-30.
  3. F. Toth, M. Dorfmeister, U. Schmid, M. Kaltenbacher, M. Schneider:
    "Non-Linear Dynamics of a Circular Piezoelectric Multi-Layer Plate";
    Talk: 13th International Workshop on Direct and Inverse Problems in Piezoelectricity, Kassel; 2017-10-04 - 2017-10-06.
  4. M. Schneider, P.M. Mayrhofer, M. Gillinger, G. Pfusterschmied, U. Schmid:
    "Piezoelectric MEMS: Material Aspects and Devices";
    Talk: AMA Conferences 2017 - SENSOR 2017 and IRS˛ 201, Nürnberg, Germany (invited); 2017-05-30 - 2017-06-01.
  5. M. Schneider, J.L. Sànchez-Rojas, U. Schmid:
    "High Performance Piezoelectric AlN MEMS Resonators for Precise Sensing of Liquid Properties";
    Talk: Internatinal Conference on Small Science (ICSS), San Sebastian, Spanien (invited); 2017-05-09 - 2017-05-12.
  6. M. Schneider, A. Bittner, U. Schmid:
    "Characterization of the Mechanical and Piezoelectric Properties of Aluminium Nitride Thin Films at Varying Film Thickness";
    Talk: Piezoworkshop 2014, Wien; 2014-09-21 - 2014-09-24.
  7. C. Derntl, J. Schalko, M. Schneider, A. Bittner, U. Schmid, H.-J. Schmiedmayer, M. Trupke:
    "Arrays of open, independently tunable microcavities for quantum emitters";
    Poster: Artificial Atoms: From Quantum Physics to Applications, Budapest, Hungary; 2013-05-20 - 2013-05-23.
  8. A. Alamin Dow, H. Al-Rubaye, D. Koo, M. Schneider, A. Bittner, U. Schmid, N. Kherani:
    "Modeling and Analysis of a Micromachined Piezoelectric Energy Harvester Stimulated by Ambient Random Vibrations";
    Talk: Smart Sensors, Actuators, and MEMS V, Prag; 2011-04-18 - 2011-04-20.
  9. J. Schalko, R. Beigelbeck, M. Stifter, M. Schneider, A. Bittner, U. Schmid:
    "Improved Load-Deflection Method for the Extraction of Elastomechanical Properties of Circularly-Shaped Thin-Film Diaphragms";
    Talk: Smart Sensors, Actuators, and MEMS V, Prag; 2011-04-18 - 2011-04-20.

Patents

  1. M. Jandak, M. Schneider, U. Schmid:
    "MEMS Sensors with Selectively Adjusted Damping of Suspension";
    Patent: GB, No. GB 2558392 B; submitted: 2017-11-06, granted: 2021-08-04.
  2. T. Frischmuth, M. Schneider, M. Kahn, G. Denifl, D. Maurer, U. Hedenig, Th. Grille, U. Schmid:
    "Micromechanical Structure and Method for Manufacturing the Same";
    Patent: China, No. CN000107539942B; submitted: 2017-06-29, granted: 2021-01-19.
  3. A. Dehe, M. Dorfmeister, M. Schneider, U. Schmid:
    "Diaphragm Element Arrangement and Related Method";
    Patent: USA, No. Us 10582304b2; submitted: 2018-11-12, granted: 2020-03-03.
  4. N. Dörr, C. Schneidhofer, F. Patocka, M. Schneider, U. Schmid:
    "Sensor zur Erfassung von Fluideigenschaften";
    Patent: Österreich, No. At 521457b1; submitted: 2018-07-13, granted: 2020-07-15.
  5. A. Dehe, M. Dorfmeister, U. Schmid, M. Schneider:
    "Membranelementanordnung und Verfahren hierzu";
    Patent: Deutschland, No. De 10 2017 126 644 B4; submitted: 2017-11-13, granted: 2020-11-12.
  6. A. Dehe, M. Dorfmeister, U. Schmid, M. Schneider:
    "Accoustic Wave Sensor";
    Patent: USA, No. Us 10684163b2; submitted: 2017-08-17, granted: 2020-06-16.
  7. M. Jandak, M. Schneider, U. Schmid:
    "MEMS Sensors with Selectively Adjusted Damping of Suspension";
    Patent: USA, No. Us 10822225b2; submitted: 2017-06-29, granted: 2020-11-03.
  8. M. Dorfmeister, M. Schneider, Th. Grille, U. Hedenig, A. Dehe, M. Kaltenbacher, U. Schmid:
    "A Micromechanical Device, an Array of Micromechanical Devices, a Method of Manufacturing a Micromechanical Device and a Method of Controlling a Micromechanical Device";
    Patent: China, No. CN 000107396276B; submitted: 2017-05-04, granted: 2020-12-22.
  9. M. Dorfmeister, M. Schneider, Th. Grille, U. Hedenig, A. Dehe, M. Kaltenbacher, U. Schmid:
    "Eine Mikroelektromechanische Vorrichtung, Eine Anordnung Mikroelektromechanischer Vorrichtungen, Ein Verfahren Zur Herstellung Einer Mikroelektromechanischen Vorrichtung Und Ein Verfahren Zum Betrieb Einer Mikroelektromechanischen Vorrichtung";
    Patent: Deutschland, No. De 10 2017 109 575 B4; submitted: 2017-05-04, granted: 2020-10-01.
  10. M. Jandak, T. Neuzil, J. Krausova, M. Schneider, U. Schmid:
    "MEMS out of plane Actuator";
    Patent: USA, No. Us 10753744b2; submitted: 2017-03-15, granted: 2020-08-25.
  11. T. Frischmuth, U. Schmid, M. Schneider, Th. Grille, D. Maurer, U. Hedenig, M. Kahn, G. Denifl:
    "Micromechanical Structure and Method for Manufacturing the Same";
    Patent: USA, No. Us 000010710874b2; submitted: 2016-06-29, granted: 2020-07-14.
  12. T. Frischmuth, U. Schmid, M. Schneider, Th. Grille, D. Maurer, U. Hedenig, M. Kahn, G. Denifl:
    "Mikromechanische Struktur und Verfahren zu ihrer Herstellung";
    Patent: Deutschland, No. De 10 2016 111 909 B4; submitted: 2016-06-29, granted: 2020-08-13.
  13. T. Frischmuth, U. Schmid, M. Schneider, Th. Grille, D. Maurer, U. Hedenig, M. Kahn, G. Denifl:
    "Micromechanical Structure and Method for Manufacturing the Same";
    Patent: Republik Korea, No. KR 000102071852b1; submitted: 2016-06-26, granted: 2020-01-30.
  14. A. Dehe, Y. Belahurau, M. Dorfmeister, C. Glacer, M. Kaltenbacher, U. Schmid, M. Schneider, D. Tumpold:
    "Microelectromechanical Loudspeaker";
    Patent: USA, No. Us 10,462,580 B2; submitted: 2018-03-22, granted: 2019-10-29.
  15. M. Jandak, T. Neuzil, J. Krausova, M. Schneider, U. Schmid:
    "Mems Out Of Plane Actuator";
    Patent: Europa, No. Ep 3 376 162 B1; submitted: 2018-03-12, granted: 2019-11-20.
  16. M. Dorfmeister, M. Schneider, Th. Grille, U. Hedenig, A. Dehe, M. Kaltenbacher, U. Schmid:
    "A Micromechanical Device, an Array of Micromechanical Devices, a Method of Manufacturing a Micromechanical Device and a Method of Controlling a Micromechanical Device";
    Patent: USA, No. Us 10516943b2; submitted: 2016-05-04, granted: 2019-12-24.
  17. T. Frischmuth, M. Schneider, M. Kahn, G. Denifl, D. Maurer, U. Hedenig, Th. Grille, U. Schmid:
    "Mikromechanische Struktur und Verfahren zur Herstellung derselben";
    Patent: China, No. CN000106185781B; submitted: 2015-05-28, granted: 2019-10-25.
  18. M. Dorfmeister, U. Schmid, M. Schneider:
    "Schallwellensensor";
    Patent: Deutschland, No. DE102016115260B3; submitted: 2016-08-17, granted: 2018-02-08.
  19. G. Denifl, T. Frischmuth, Th. Grille, U. Hedenig, P. Irsigler, M. Kahn, D. Maurer, U. Schmid, M. Schneider:
    "Micromechanical Structure Comprising Carbon Material and Method for Fabricating the Same";
    Patent: Südkorea, No. KR000101861426B1; submitted: 2016-05-27, granted: 2018-05-18.
  20. G. Denifl, T. Frischmuth, Th. Grille, U. Hedenig, P. Irsigler, M. Kahn, D. Maurer, U. Schmid, M. Schneider:
    "Micromechanical Structure Comprising Carbon Material and Method for Fabricating the Same";
    Patent: USA, No. US000010106398B2; submitted: 2015-05-28, granted: 2018-10-23.
  21. G. Denifl, T. Frischmuth, Th. Grille, U. Hedenig, P. Irsigler, M. Kahn, D. Maurer, U. Schmid, M. Schneider:
    "Mikromechanische Struktur und Verfahren zur Herstellung derselben";
    Patent: Deutschland, No. De 10 2016 208 356 B4; submitted: 2016-05-13, granted: 2017-09-07.
  22. Th. Becker, M. Kluge, M. Schneider, U. Schmid, A. Bittner:
    "Apparatus And Method For Acquiring Mechanical Loads On Thrust Elements";
    Patent: Al At Be Bg Ch Cy Cz De Dk Ee Es Fi Fr Gb Gr Hr Hu Ie Is It Li Lt Lu Lv Mc Mk Mt Nl No Pl Pt Ro Rs Se Si Sk Sm Tr, No. Ep 2 585 792 B1; submitted: 2011-06-20, granted: 2015-07-29.
  23. Th. Becker, M. Kluge, M. Schneider, A. Bittner, U. Schmid:
    "Apparatus and Method for Acquiring Mechanical Loads on Thrust Elements";
    Patent: USA, No. Us 8,677,830 B2; submitted: 2010-12-20, granted: 2014-03-25.
  24. Th. Becker, M. Kluge, M. Schneider, U. Schmid, A. Bittner:
    "Apparatus And Method For Acquiring Mechanical Loads On Thrust Elements";
    Patent: DE, No. Wo 2011/161061 A1; submitted: 2010-06-23, granted: 2011-06-20.

Habilitation Theses

  1. M. Schneider:
    "Piezoelectric Silicon Microsystems";
    TU Wien, Fakultät für Elektrotechnik und Informationstechnik, 2021.

Doctor's Theses (authored and supervised)

  1. M. Schneider:
    "Einfluss der Schichtdicke und der Substratvorbehandlung auf die elektro-mechanischen Eigenschaften von gesputterten Aluminiumnitrid-Dünnfilmen";
    Supervisor, Reviewer: U. Schmid, C. Eisenmenger-Sittner; E366, 2014; oral examination: 2014-02-12.

Diploma and Master Theses (authored and supervised)

  1. P. Schmid:
    "Druck- und temperaturabhängiges Resonanzverhalten von Aluminiumnitrid basierten MEMS-Bauelementen";
    Supervisor: U. Schmid, M. Schneider; E366, 2013; final examination: 2013-11-20.