@inproceedings{TUW-190470,
author = {Muhr, Robert and Schutte, Gerrit and Vincze, Markus},
title = {3D Geometry Measurement of Silicon Wafers based on a Deflectometric Method},
booktitle = {Proceedings of the AEC/APC},
year = {2010},
note = {Posterpr{\"a}sentation: AEC/APC - 10th European Advanced Equipment Control/Advanced Process Control, Catania Sizilien, Italien; 2010-04-28 -- 2010-04-30}
}