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@inproceedings{TUW-190470,
    author = {Muhr, Robert and Schutte, Gerrit and Vincze, Markus},
    title = {3D Geometry Measurement of Silicon Wafers based on a Deflectometric Method},
    booktitle = {Proceedings of the AEC/APC},
    year = {2010},
    note = {poster presentation: AEC/APC - 10th European Advanced Equipment Control/Advanced Process Control, Catania Sizilien, Italien; 2010-04-28 -- 2010-04-30}
}