[Zurück]

@inproceedings{TUW-197894,
    author = {Mair, Florian and Egretzberger, Markus and Kugi, Andreas},
    title = {Hardware Implementation of an Electrostatic MEMS-Actuator Linearization},
    booktitle = {Smart Sensors, Actuators, and MEMS V},
    year = {2011},
    publisher = {SPIE},
    address = {Volume 8066 / Washington},
    isbn = {9780819486554},
    doi = {10.1117/12.886793},
    note = {Vortrag: Smart Sensors, Actuators, and MEMS V, Prag; 2011-04-18 -- 2011-04-20}
}