@misc{TUW-199495, author = {Manoli, Yiannos and Maurer, Michael and Egretzberger, Markus and Kugi, Andreas and Mair, Florian and Northemann, Thomas}, title = {Method For The Decoupled Control Of The Quadrature And The Resonance Frequency Of A Micro-Mechanical Rotation Rate Sensor By Means Of Sigma-Delta-Modulation}, year = {2011}, howpublished = {patent}, note = {submitted: 2011-03-17, granted: 2011-09-22} }