@misc{TUW-199497, author = {Egretzberger, Markus and Mair, Florian and Kugi, Andreas and Northemann, Thomas and Maurer, Michael and Manoli, Yiannos}, title = {Verfahren zur entkoppelten Regelung der Quadratur und der Resonanzfrequenz eines mikromechanischen Drehratensensors mittels Sigma-Delta-Modulation}, year = {2011}, howpublished = {patent}, note = {submitted: 2011-03-17, granted: 2011-09-22} }