[Zurück]

@article{TUW-207882,
    author = {Steininger, J{\"u}rgen and Kuiper, Stefan and Ito, Shingo and Schitter, Georg},
    title = {Schnelle Rasterkraftmikroskopie durch moderne Regelungstechnik und mechatronische Systemintegration},
    journal = {E{\&}I Elektrotechnik und Informationstechnik},
    year = {2012},
    volume = {129},
    number = {1},
    pages = {28--33},
    doi = {10.1007/s00502-012-0070-8},
    keywords = {SPM; AFM; scanning probe; control; nanotechnology; nanometrology}
}