@article{TUW-207882,
author = {Steininger, J{\"u}rgen and Kuiper, Stefan and Ito, Shingo and Schitter, Georg},
title = {Schnelle Rasterkraftmikroskopie durch moderne Regelungstechnik und mechatronische Systemintegration},
journal = {E{\&}I Elektrotechnik und Informationstechnik},
year = {2012},
volume = {129},
number = {1},
pages = {28--33},
doi = {10.1007/s00502-012-0070-8},
keywords = {SPM; AFM; scanning probe; control; nanotechnology; nanometrology}
}
Created from the Publication Database of the Vienna University of Technology.