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@article{TUW-208565,
    author = {Mair, Florian and Egretzberger, Markus and Kugi, Andreas},
    title = {Hardware implementation of an electrostatic MEMS-actuator linearization},
    journal = {Microsystem Technologies - Micro- and Nanosystems - Information Storage and Processing Systems},
    year = {2012},
    volume = {18},
    number = {7},
    pages = {955--963},
    doi = {10.1007/s00542-011-1420-x}
}