[Zurück]

@article{TUW-212559,
    author = {Schitter, Georg and Steininger, J{\"u}rgen and Heuck, Friedjof C.A. and Staufer, Urs},
    title = {Towards fast AFM-based nanometrology and nanomanufacturing},
    journal = {International Journal of Nanomanufacturing},
    year = {2012},
    volume = {8},
    number = {5/6},
    pages = {392--418},
    keywords = {nanometrology; nanomanufacturing; atomic force microscope; AFM; nanolithography.}
}