@inproceedings{TUW-222312,
author = {Ito, Shingo and Steininger, J{\"u}rgen and Chang, Peter I. and Schitter, Georg},
title = {High-precision Positioning System using a Low-stiffness Dual Stage Actuator},
booktitle = {Proceedings of 6th IFAC Symposium on Mechatronic Systems},
year = {2013},
pages = {20--27},
keywords = {dual stage actuator, high precision positioning system, Lorentz actuator, low stiffness actuator},
note = {talk: 6th IFAC Symposium on Mechatronic Systems, Hangzhou, China; 2013-04-10 -- 2013-04-12}
}
Created from the Publication Database of the Vienna University of Technology.