@misc{TUW-222363, author = {Egretzberger, Markus and Kugi, Andreas and Mair, Florian and Maurer, Michael and Manoli, Yiannos and Northemann, Thomas}, title = {Method for the decoupled control of the quadrature and the resonance frequency of a micro-mechanical rotation rate sensor by means of sigma-delta-modulation}, year = {2013}, howpublished = {Patent}, note = {eingereicht: 2010-03-17, erteilt: 2013-01-23} }