@misc{TUW-222365, author = {Egretzberger, Markus and Kugi, Andreas and Mair, Florian and Maurer, Michael and Manoli, Yiannos and Northemann, Thomas}, title = {Method For The Decoupled Control Of The Quadrature And The Resonance Frequency Of A Micro-Mechanical Rotation Rate Sensor By Means Of Sigma-Delta-Modulation}, year = {2013}, howpublished = {patent}, note = {submitted: 2010-03-17, granted: 2013-02-28} }