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@inproceedings{TUW-229786,
    author = {Steininger, J{\"u}rgen and Paris, Ren{\'e} and Schitter, Georg},
    title = {Improving the Deflection Readout Mechanism of an Atomic Force Microscope},
    booktitle = {MESS14 Microelectronic Systems Symposium, Band 76 der OVE-Schriftenreihe},
    year = {2014},
    pages = {22},
    address = {76},
    isbn = {978-3-85133-082-3},
    note = {poster presentation: MESS14 Microelectronic Systems Symposium, Vienna; 2014-05-08 -- 2014-05-09}
}



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