@inproceedings{TUW-229786,
author = {Steininger, J{\"u}rgen and Paris, Ren{\'e} and Schitter, Georg},
title = {Improving the Deflection Readout Mechanism of an Atomic Force Microscope},
booktitle = {MESS14 Microelectronic Systems Symposium, Band 76 der OVE-Schriftenreihe},
year = {2014},
pages = {22},
address = {76},
isbn = {978-3-85133-082-3},
note = {poster presentation: MESS14 Microelectronic Systems Symposium, Vienna; 2014-05-08 -- 2014-05-09}
}
Created from the Publication Database of the Vienna University of Technology.