@article{TUW-229969, author = {Saathof, Rudolf and Spronck, Jo W. and Schmidt, Rob Munnig}, title = {Design of an AM for EUV lithography}, journal = {Mikroniek}, year = {2014}, volume = {54}, number = {3}, pages = {11--14}, url = {http://publik.tuwien.ac.at/files/PubDat_229969.pdf} }