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@article{TUW-229969,
    author = {Saathof, Rudolf and Spronck, Jo W. and Schmidt, Rob Munnig},
    title = {Design of an AM for EUV lithography},
    journal = {Mikroniek},
    year = {2014},
    volume = {54},
    number = {3},
    pages = {11--14},
    url = {http://publik.tuwien.ac.at/files/PubDat_229969.pdf}
}