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@inproceedings{TUW-233075,
    author = {Saathof, Rudolf and Spronck, Jo W. and Munnig Schmidt, Robert},
    title = {Counteracting Thermal Issues in EUV-Lithography using an Adaptive Optics System},
    booktitle = {Proceeding of the EUSPEN Special Interest Group: Thermal Issues},
    year = {2014},
    numpages = {2},
    isbn = {978-0-9566790-4-8},
    note = {talk: EUSPEN Special Interest Group: Thermal Issues, Z{\"u}rich, Schweiz; 2014-03-19 -- 2014-03-20}
}



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