@inproceedings{TUW-233075,
author = {Saathof, Rudolf and Spronck, Jo W. and Munnig Schmidt, Robert},
title = {Counteracting Thermal Issues in EUV-Lithography using an Adaptive Optics System},
booktitle = {Proceeding of the EUSPEN Special Interest Group: Thermal Issues},
year = {2014},
numpages = {2},
isbn = {978-0-9566790-4-8},
note = {talk: EUSPEN Special Interest Group: Thermal Issues, Z{\"u}rich, Schweiz; 2014-03-19 -- 2014-03-20}
}
Created from the Publication Database of the Vienna University of Technology.