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@unpublished{TUW-236535,
    author = {Fraxedas, Jordi and Staufer, Urs and Munnig Schmidt, Robert and Spronck, Jo W. and Trinidad, Enrique Rull and Deng, Ruijun and Schitter, Georg and Thier, Markus and Messineo, Saverio and Ito, Shingo and Hainisch, Reinhard and Saathof, Rudolf and Perez-Murano, Francesc and Verdaguer, Albert and Bl{\"u}mel, Alexander and List-Kratochvil, Emil J. W. and Koops, Richard and van Veghel, Marijn and Sum, Robert and Lieb, Andreas and Schott, Walter and Dontsov, Denys and Sulzbach, Thomas and Engl, Wolfgang and Penzkofer, Christian and Colominas, Carles and Fluch, Karl and Garcia-Granada, Andr{\'e}s-Amador and Puigoriol-Forcada, Josep Maria},
    title = {Automated inline Metrology for Nanoscale Production - aim4np},
    year = {2014},
    note = {poster presentation: European Conference on Surface Science, Antalya (Turkey); 2014-08-31 -- 2014-09-05}
}