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@article{TUW-238448,
    author = {Saathof, Rudolf and Schutten, Gerrit Jan M. and Spronck, Jo W. and Schmidt, Rob Munnig},
    title = {Design and characterisation of an active mirror for EUV-lithography},
    journal = {Precision Engineering},
    year = {2015},
    volume = {41},
    pages = {102--110},
    doi = {10.1016/j.precisioneng.2015.03.004},
    note = {invited}
}