@article{TUW-240765, author = {Ito, Shingo and Steininger, J{\"u}rgen and Schitter, Georg}, title = {Low-stiffness Dual Stage Actuator for Long Rage Positioning with Nanometer Resolution}, journal = {Mechatronics}, year = {2015}, volume = {29}, pages = {46--56}, url = {https://publik.tuwien.ac.at/files/publik_240765.pdf}, doi = {10.1016/j.mechatronics.2015.05.007} }