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@article{TUW-242211,
    author = {Thier, Markus and Saathof, Rudolf and Csencsics, Ernst and Hainisch, Reinhard and Sinn, Andreas and Schitter, Georg},
    title = {Entwurf und Regelung eines Positioniersystems f{\"u}r robotergest{\"u}tzte Nanomesstechnik},
    journal = {at - Automatisierungstechnik},
    year = {2015},
    volume = {63},
    pages = {727--738},
    url = {https://publik.tuwien.ac.at/files/publik_242211.pdf},
    keywords = {In-Prozess-Messtechnik, Pr{\"a}zisionspositionierung, Pr{\"a}zisionsmesstechnik, Instrumentierung.}
}



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