[Back]

@inproceedings{TUW-244712,
    author = {Thier, Markus and Saathof, Rudolf and Hainisch, Reinhard and Schitter, Georg},
    title = {Vibration Compensation Platform for Robot-based Nanoscale Measurements},
    booktitle = {Proceedings of the 15th international conference of the european society for precision engineering and nanotechnology},
    year = {2015},
    pages = {211--212},
    isbn = {978-0-9566790-7-9},
    keywords = {Active vibration isolation, Nanometrology, Mechatronic system design, High precision measurement},
    note = {talk: euspen's 15th International Conference {\&} Exhibition, Leuven (Belgium); 2015-06-01 -- 2015-06-05}
}