author = {Thier, Markus and Saathof, Rudolf and Sinn, Andreas and Hainisch, Reinhard and Schitter, Georg},
    title = {Six Degree of Freedom Vibration Isolation Platform for In-Line Nano-Metrology},
    booktitle = {Proceedings of the 7th IFAC Symposium on Mechatronic Systems},
    year = {2016},
    pages = {149--156},
    keywords = {Vibration isolation, Systems design, Nano-metrology, Precision positioning systems.},
    note = {talk: 7th IFAC Symposium on Mechatronic Systems {\&} 15th Mechatronics Forum International Conference, Loughborough (Vereinigte K{\"o}nigreich); 2016-09-05 -- 2016-09-08}

Created from the Publication Database of the Vienna University of Technology.