[Zurück]

@inproceedings{TUW-251149,
    author = {Unger, Severin and Ito, Shingo and Kohl, Dominik and Schitter, Georg},
    title = {Development of a Compact Atomic Force Microscope Based on an Optical Pickup Head},
    booktitle = {Proceedings of the 7th IFAC Symposium on Mechatronic Systems},
    year = {2016},
    pages = {629--635},
    keywords = {atomic force microscopy, optical pickup head, precision measurements, flexure based nanopositioning, voice coil motor},
    note = {Vortrag: 7th IFAC Symposium on Mechatronic Systems {\&} 15th Mechatronics Forum International Conference, Loughborough (Vereinigte K{\"o}nigreich); 2016-09-05 -- 2016-09-08}
}