[Zurück]

@article{TUW-254383,
    author = {Saathof, Rudolf and Wansink, Martijn V. and Hoijkamp, Evert and Spronck, Jo W. and Munnig Schmidt, Robert},
    title = {Deformation control of a thermal active mirror},
    journal = {Mechatronics},
    year = {2016},
    volume = {39},
    pages = {12--27},
    keywords = {Adaptive optics, deformable mirror, active mirror, EUV lithography, wavefront distortion}
}