@unpublished{TUW-254397,
author = {Thier, Markus and Saathof, Rudolf and Hainisch, Reinhard and Schitter, Georg},
title = {Metrology Platform to Enable In-Line Nanometrology},
year = {2016},
note = {Posterpr{\"a}sentation: Industrial Technologies 2016, Amsterdam (the Netherlands); 2016-06-22 -- 2016-06-24}
}