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@unpublished{TUW-254397,
    author = {Thier, Markus and Saathof, Rudolf and Hainisch, Reinhard and Schitter, Georg},
    title = {Metrology Platform to Enable In-Line Nanometrology},
    year = {2016},
    note = {poster presentation: Industrial Technologies 2016, Amsterdam (the Netherlands); 2016-06-22 -- 2016-06-24}
}