@unpublished{TUW-254400, author = {Lieb, Andreas and Howald, Lukas and Fricker, Simon and Thier, Markus and Schitter, Georg}, title = {Atomic Force Microscope for In-Line Metrology}, year = {2016}, note = {poster presentation: Industrial Technologies 2016, Amsterdam (the Netherlands); 2016-06-22 -- 2016-06-24} }