@article{TUW-259386, author = {Ito, Shingo and Unger, Severin and Schitter, Georg}, title = {Vibration isolator carrying atomic force microscope's head}, journal = {Mechatronics}, year = {2017}, volume = {44}, pages = {32--41}, url = {https://publik.tuwien.ac.at/files/publik_259386.pdf} }