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@article{TUW-261421,
    author = {Saathof, Rudolf and Thier, Markus and Hainisch, Reinhard and Schitter, Georg},
    title = {Integrated system and control design of a one DoF nano-metrology platform},
    journal = {Mechatronics},
    year = {2017},
    volume = {47},
    pages = {88--96},
    keywords = {In-process measurement, Precision positioning, Precision measurement, Instrumentation}
}