[Zurück]

@inproceedings{TUW-262810,
    author = {Riel, Thomas and Galffy, Andras and Sinn, Andreas and Schitter, Georg},
    title = {Improvement of the angular precision of an optical metrology platform by disturbance compensation},
    booktitle = {Proceedings of the 2017 Spring Topical Meeting on Precision Engineering and Optics: What are the Limits of Precision, and How to Characterize Them?},
    year = {2017},
    pages = {15--20},
    isbn = {978-1-887706-73-5},
    note = {Vortrag: 2017 ASPE Spring Topical Meeting on Precision Engineering and Optics, Tucson (USA); 2017-04-24 -- 2017-04-25}
}