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@article{TUW-263910,
    author = {Ito, Shingo and Schitter, Georg},
    title = {Atomic Force Microscopy Capable of Vibration Isolation with Low-stiffness Z-axis Actuation},
    journal = {Ultramicroscopy},
    year = {2018},
    volume = {186},
    numpages = {9},
    url = {https://publik.tuwien.ac.at/files/publik_263910.pdf},
    doi = {10.1016/j.ultramic.2017.12.007},
    keywords = {Atomic force microscopy, Vibration isolation, Voice coil actuators, Robust control}
}