@article{TUW-263940, author = {Kohl, Dominik and Mesquida, Patrick and Schitter, Georg}, title = {Quantitative AC - Kelvin Probe Force Microscopy}, journal = {Microelectronic Engineering}, year = {2017}, volume = {176}, pages = {28--32}, keywords = {SPM, AFM, KPFM, DC free, surface potential} }