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@article{TUW-272944,
    author = {Ito, Shingo and Troppmair, Stefan and Cigarini, Francesco and Schitter, Georg},
    title = {High-speed Scanner with Nanometer Resolution Using a Hybrid Reluctance Force Actuator},
    journal = {IEEJ Journal of Industry Applications},
    year = {2019},
    volume = {8},
    number = {2},
    numpages = {7},
    doi = {10.1541/ieejjia.8.170},
    keywords = {High-precision actuators, hybrid reluctance actuator, nanopositioning, motion control.}
}