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@article{TUW-273524,
    author = {Fuerst, Martin and Unger, Severin and Ito, Shingo and Schitter, Georg},
    title = {Wavefront measurement based feedback control for automatic alignment of a high-NA optical system},
    journal = {Journal of Physics: Conference Series},
    year = {2018},
    volume = {1065},
    numpages = {4},
    url = {https://publik.tuwien.ac.at/files/publik_273524.pdf},
    doi = {10.1088/1742-6596/1065/3/032001}
}



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