@article{TUW-273524,
author = {Fuerst, Martin and Unger, Severin and Ito, Shingo and Schitter, Georg},
title = {Wavefront measurement based feedback control for automatic alignment of a high-NA optical system},
journal = {Journal of Physics: Conference Series},
year = {2018},
volume = {1065},
numpages = {4},
url = {https://publik.tuwien.ac.at/files/publik_273524.pdf},
doi = {10.1088/1742-6596/1065/3/032001}
}