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@inproceedings{TUW-281655,
    author = {Ito, Shingo and Lindner, Bernhard and Schitter, Georg},
    title = {Sample-tracking Vibration Isolation with Hybrid Reluctance Actuators for Inline Metrology},
    booktitle = {Proceedings of the Joint Conference 8th IFAC Symposium on Mechatronic Systems (MECHATRONICS 2019), and 11th IFAC Symposium on Nonlinear Control Systems (NOLCOS 2019)},
    year = {2019},
    journal = {IFAC-PapersOnLine/Elsevier},
    volume = {52/15},
    numpages = {6},
    doi = {10.1016/j.ifacol.2019.11.731},
    keywords = {Vibration control, Micro and Nano Mechatronic Systems, Motion Control Systems},
    note = {talk: Joint Conference 8th IFAC Symposium on Mechatronic Systems (MECHATRONICS 2019), and 11th IFAC Symposium on Nonlinear Control Systems (NOLCOS 2019), Wien; 2019-09-04 -- 2019-09-06}
}



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