[Zurück]

@inproceedings{TUW-282507,
    author = {Brunner, David and Yoo, Han Woong and Thurner, Thomas and Schitter, Georg},
    title = {Data based Modelling and Identification of Nonlinear SDOF MOEMS Mirror},
    booktitle = {MOEMS and Miniaturized Systems XVIII},
    year = {2019},
    journal = {SPIE},
    volume = {10931},
    numpages = {11},
    url = {https://publik.tuwien.ac.at/files/publik_282507.pdf},
    doi = {10.1117/12.2508429},
    keywords = {Micro-Opto-Electro-Mechanical System (MOEMS), Resonant scanning mirror, Data based identification, Generalized nonlinear SDOF model, Actuated decay, Comb-drive torque},
    note = {Vortrag: SPIE Photonics West 2019, San Francisco, California, USA; 2019-02-02 -- 2019-02-07}
}