[Back]

@inproceedings{TUW-283447,
    author = {Yoo, Han Woong and Brunner, David and Thurner, Thomas and Schitter, Georg},
    title = {MEMS Test Bench and its Uncertainty Analysis for Evaluation of MEMS Mirrors},
    booktitle = {Proceedings of the Joint Conference 8th IFAC Symposium on Mechatronic Systems (MECHATRONICS 2019), and 11th IFAC Symposium on Nonlinear Control Systems (NOLCOS 2019)},
    year = {2019},
    journal = {IFAC-PapersOnLine/Elsevier},
    volume = {52/15},
    numpages = {6},
    doi = {10.1016/j.ifacol.2019.11.648},
    keywords = {Metrology, Uncertainty analysis, Characterization, Microelectromechanical systems (MEMS), MEMS mirror},
    note = {talk: Joint Conference 8th IFAC Symposium on Mechatronic Systems (MECHATRONICS 2019), and 11th IFAC Symposium on Nonlinear Control Systems (NOLCOS 2019), Wien; 2019-09-04 -- 2019-09-06}
}



Created from the Publication Database of the Vienna University of Technology.