[Zurück]

@inproceedings{TUW-283456,
    author = {Schroedter, Richard and Grahmann, Jan and Janschek, Klaus},
    title = {Silicone Oil Damping for Quasi-static Micro Scanners with Electrostatic Staggered Vertical Comb Drives},
    booktitle = {Proceedings of the Joint Conference 8th IFAC Symposium on Mechatronic Systems (MECHATRONICS 2019), and 11th IFAC Symposium on Nonlinear Control Systems (NOLCOS 2019)},
    year = {2019},
    editor = {Schroedter, Richard and Grahmann, Jan and Janschek, Klaus},
    journal = {IFAC-PapersOnLine/Elsevier},
    volume = {52/15},
    numpages = {6},
    url = {https://publik.tuwien.ac.at/files/publik_283456.pdf},
    doi = {10.1016/j.ifacol.2019.11.646},
    keywords = {laser beam guidance, quasi-static micro scanner, electrostatic staggered vertical comb drive, silicone oil, viscous passive damping, permittivity, close-loop trajectory control},
    note = {Vortrag: Joint Conference 8th IFAC Symposium on Mechatronic Systems (MECHATRONICS 2019), and 11th IFAC Symposium on Nonlinear Control Systems (NOLCOS 2019), Wien; 2019-09-04 -- 2019-09-06}
}



Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.