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@article{TUW-288427,
    author = {Schroedter, Richard and Roth, Matthias and Janschek, Klaus and Sandner, Thilo},
    title = {Flatness-based open-loop and closed-loop control for electrostatic quasi-static microscanners using jerk-limited trajectory design},
    journal = {Mechatronics},
    year = {2018},
    volume = {56},
    numpages = {16},
    url = {https://publik.tuwien.ac.at/files/publik_288427.pdf},
    doi = {10.1016/j.mechatronics.2017.03.005},
    keywords = {MEMS, Quasi-static/resonant microscanner, Electrostatic staggered vertical comb, Jerk-limited triangle trajectory, Flatness-based open-loop and closed-loop control, Global extended Luenberger observer}
}