@inproceedings{TUW-288570,
author = {Schroedter, Richard and Sandner, Thilo and Janschek, Klaus and Roth, Matthias and Hruschka, Clemens},
title = {Real-time closed-loop control for micro mirrors with quasistatic comb drives},
booktitle = {Proc. SPIE 9760, MOEMS and Miniaturized Systems XV},
year = {2016},
numpages = {13},
url = {https://publik.tuwien.ac.at/files/publik_288570.pdf},
doi = {10.1117/12.2208431},
note = {Vortrag: SPIE Photonics West 2016, San Francisco; 2016-02-13 -- 2016-02-18}
}
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.