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@inproceedings{TUW-288570,
    author = {Schroedter, Richard and Sandner, Thilo and Janschek, Klaus and Roth, Matthias and Hruschka, Clemens},
    title = {Real-time closed-loop control for micro mirrors with quasistatic comb drives},
    booktitle = {Proc. SPIE 9760, MOEMS and Miniaturized Systems XV},
    year = {2016},
    numpages = {13},
    url = {https://publik.tuwien.ac.at/files/publik_288570.pdf},
    doi = {10.1117/12.2208431},
    note = {talk: SPIE Photonics West 2016, San Francisco; 2016-02-13 -- 2016-02-18}
}