[Zurück]

@inproceedings{TUW-288571,
    author = {Schroedter, Richard and Schwarzenberg, Markus and Dreyhaupt, Andre and Barth, Robert and Sandner, Thilo and Janschek, Klaus},
    title = {Microcontroller based closed-loop control of a 2D quasi-static/resonant microscanner with on-chip piezo-resistive sensor feedback},
    booktitle = {Proc. SPIE 10116, MOEMS and Miniaturized Systems XVI},
    year = {2017},
    numpages = {11},
    url = {https://publik.tuwien.ac.at/files/publik_288571.pdf},
    doi = {10.1117/12.2251802},
    note = {Vortrag: SPIE Photonics West 2017, San Francisco; 2016-02-13 -- 2016-02-18}
}



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